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    CARBON NANOTUBE COLUMNS AND METHODS OF MAKING AND USING CARBON NANOTUBE COLUMNS AS PROBES
    1.
    发明申请
    CARBON NANOTUBE COLUMNS AND METHODS OF MAKING AND USING CARBON NANOTUBE COLUMNS AS PROBES 审中-公开
    碳纳米管柱及制备和使用碳纳米管柱作为探针的方法

    公开(公告)号：WO2011031759A2

    公开(公告)日：2011-03-17

    申请号：PCT/US2010/048129

    申请日：2010-09-08

    Applicant: FORMFACTOR, INC. ,  ELDRIDGE, Benjamin N. ,  FANG, Treliant ,  MATHIEU, Gaetan L. ,  YAGLIOGLU, Onnik

    Inventor： ELDRIDGE, Benjamin N. ,  FANG, Treliant ,  MATHIEU, Gaetan L. ,  YAGLIOGLU, Onnik

    IPC: B82B3/00 ,  B82B1/00 ,  C01B31/02

    CPC classification number: B82Y40/00 ,  B82Y10/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B2202/08 ,  G01R1/06755 ,  G01R3/00 ,  Y10T29/49117

    Abstract: Carbon nanotube columns each comprising carbon nanotubes can be utilized as electrically conductive contact probes. The columns can be grown, and parameters of a process for growing the columns can be varied while the columns grow to vary mechanical characteristics of the columns along the growth length of the columns. Metal can then be deposited inside and/or on the outside of the columns, which can enhance the electrical conductivity of the columns. The metalized columns can be coupled to terminals of a wiring substrate. Contact tips can be formed at or attached to ends of the columns. The wiring substrate can be combined with other electronic components to form an electrical apparatus in which the carbon nanotube columns can function as contact probes.

    Abstract translation: 各自包含碳纳米管的碳纳米管柱可以用作导电接触探针。 可以生长这些柱，并且生长柱的过程的参数可以变化，同时柱生长以改变沿着柱的生长长度的柱的机械特性。 然后金属可以沉积在柱内部和/或外部，这可以增强柱的导电性。 金属化柱可以连接到布线基板的端子。 触点尖端可以形成在或连接到柱的末端。 布线基板可以与其他电子部件组合以形成电气设备，其中碳纳米管柱可以用作接触探针。

    APPARATUS AND METHOD FOR CLEANING TEST PROBES
    4.
    发明申请
    APPARATUS AND METHOD FOR CLEANING TEST PROBES 审中-公开
    清洁测试探针的装置和方法

    公开(公告)号：WO2003062322A1

    公开(公告)日：2003-07-31

    申请号：PCT/US2003/001577

    申请日：2003-01-16

    Applicant: FORMFACTOR, INC.

    Inventor： KHANDROS, Igor, K. ,  ELDRIDGE, Benjamin, N. ,  FANG, Treliant ,  MATHIEU, Gaetan, L. ,  GRUBE, Gary, W. ,  DRUSH, Michael, A. ,  BUCKHOLTZ, Christopher, C.

    IPC: C08L83/04

    CPC classification number: C08G77/48 ,  B08B1/00 ,  B08B7/0028 ,  G01R1/06711 ,  G01R3/00 ,  Y10T428/24388 ,  Y10T428/31663

    Abstract: A probe cleaning apparatus for cleaning a probe tip use to test semiconductors dies having an abrasive substrate layer an a tacky gel layer on top of the abrasive surface of the abrasive substrate layer. The probe tip is cleaned by passing it through the tacky gel layer so that it comes in contact with the abrasive surface of the abrasive substrate, moving the probe tip across the abrasive surface of the substrate layer, and then removing the probe tip from the successive layers of the cleaning apparatus. The probe tip emerges from the cleaning apparatus free from debris associated with testing the semiconductor dies.

    Abstract translation: 用于清洁探针头的探针清洁装置用于测试在磨料基底层的研磨表面的顶部上具有磨料基底层和粘性凝胶层的半导体模具。 通过将探针尖端通过粘性凝胶层进行清洁，使其与磨料基材的研磨表面接触，使探针尖端跨过基底层的研磨表面，然后从连续的 层的清洁装置。 探针尖端从清洁设备中出来，没有与测试半导体管芯相关的碎片。

    A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE
    5.
    发明公开
    A PROBE ARRAY STRUCTURE AND A METHOD OF MAKING A PROBE ARRAY STRUCTURE 审中-公开
    一种探针阵列结构及一种探针阵列结构的制作方法

    公开(公告)号：EP1977260A2

    公开(公告)日：2008-10-08

    申请号：EP06847882.5

    申请日：2006-12-19

    Applicant: FormFactor, Inc.

    Inventor： ELDRIDGE, Benjamin, N. ,  FANG, Treliant ,  GRITTERS, John K. ,  KHANDROS, Igor, Y. ,  MA, Lunyu ,  MATHIEU, Gaetan, L.

    IPC: G01R31/02

    CPC classification number: G01R3/00 ,  G01R1/06716 ,  G01R1/06727 ,  G01R1/06744

    Abstract: Probe array structures and methods of making probe array structures are disclosed. A plurality of electrically conductive elongate contact structures disposed on a first substrate can be provided. The contact structures can then be partially encased in a securing material such that ends of the contact structures extend from a surface of the securing material. The exposed portions of the contact structures can then be captured in a second substrate.

    Abstract translation: 公开了探针阵列结构和制造探针阵列结构的方法。 可以提供布置在第一衬底上的多个导电细长接触结构。 接触结构然后可以部分地包封在固定材料中，使得接触结构的端部从固定材料的表面延伸。 接触结构的暴露部分然后可以被捕获在第二衬底中。

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