公开(公告)号：EP0846191A4

公开(公告)日：2004-05-19

申请号：EP97921093

申请日：1997-04-02

Applicant: FUSION SYSTEMS CORP

Inventor： KAMAREHI MOHAMMAD ,  PINGREE RICHARD ,  SHI JIANOU ,  COX GERALD

IPC: C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00 ,  C23F1/02 ,  H01L21/00

CPC classification number: H01J37/32192

Abstract: A method of removing material from a substrate (88), and a plasma discharge device wherein a plasma is excited by microwave energy (91, 93, 95, 97) having an electric field which is azimuthally and axially uniform in relation to the plasma tube (40). The microwave cavity is divided longitudinally into sections by conducting partitions (44, 45, 46), each of which is separately fed with microwave energy (91, 93, 95, 97), and the plasma tube (40) extends through openings in the partitions (44, 45, 46).