公开(公告)号：DE19638117A1

公开(公告)日：1997-03-27

申请号：DE19638117

申请日：1996-09-18

Applicant: FUSION SYSTEMS CORP

Inventor： WOOTEN DAVID ,  KREIN BRUCE ,  SHI JIANOU

IPC: G01J5/12 ,  G01J5/14 ,  G01K1/14 ,  G01K7/02

Abstract: The head with its contact surface extending essentially in correspondence with a projection surface of this probe head, and this projection surface corresponds or nearly corresponds to the largest projection surface of temp. probe head (1). The contacting temp. probe has a plane contact section, a plane contact surface on the plane contact section, a hollow chamber (5) in the plane contact section and a temp. sensitive unit (6a,6b) is arranged in this hollow chamber. A probe head holder (2) is provided and arranged so that between the probe head and the holder, point or line contact exists.

公开(公告)号：EP0846191A4

公开(公告)日：2004-05-19

申请号：EP97921093

申请日：1997-04-02

Applicant: FUSION SYSTEMS CORP

Inventor： KAMAREHI MOHAMMAD ,  PINGREE RICHARD ,  SHI JIANOU ,  COX GERALD

IPC: C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00 ,  C23F1/02 ,  H01L21/00

CPC classification number: H01J37/32192

Abstract: A method of removing material from a substrate (88), and a plasma discharge device wherein a plasma is excited by microwave energy (91, 93, 95, 97) having an electric field which is azimuthally and axially uniform in relation to the plasma tube (40). The microwave cavity is divided longitudinally into sections by conducting partitions (44, 45, 46), each of which is separately fed with microwave energy (91, 93, 95, 97), and the plasma tube (40) extends through openings in the partitions (44, 45, 46).