公开(公告)号：EP0846191A4

公开(公告)日：2004-05-19

申请号：EP97921093

申请日：1997-04-02

Applicant: FUSION SYSTEMS CORP

Inventor： KAMAREHI MOHAMMAD ,  PINGREE RICHARD ,  SHI JIANOU ,  COX GERALD

IPC: C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23C16/00 ,  C23F1/02 ,  H01L21/00

CPC classification number: H01J37/32192

Abstract: A method of removing material from a substrate (88), and a plasma discharge device wherein a plasma is excited by microwave energy (91, 93, 95, 97) having an electric field which is azimuthally and axially uniform in relation to the plasma tube (40). The microwave cavity is divided longitudinally into sections by conducting partitions (44, 45, 46), each of which is separately fed with microwave energy (91, 93, 95, 97), and the plasma tube (40) extends through openings in the partitions (44, 45, 46).

公开(公告)号：DE69510576T2

公开(公告)日：2000-01-13

申请号：DE69510576

申请日：1995-02-20

Applicant: FUSION SYSTEMS CORP

Inventor： KAMAREHI MOHAMMAD ,  SIMPSON JAMES E

IPC: H05H1/46 ,  G03F7/34 ,  H01J37/32 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01P7/06 ,  H05B6/76

Abstract: A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity.

公开(公告)号：DE69510576D1

公开(公告)日：1999-08-12

申请号：DE69510576

申请日：1995-02-20

Applicant: FUSION SYSTEMS CORP

Inventor： KAMAREHI MOHAMMAD ,  SIMPSON JAMES E

IPC: H05H1/46 ,  G03F7/34 ,  H01J37/32 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01P7/06 ,  H05B6/76

Abstract: A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity.

公开(公告)号：DE3626922A1

公开(公告)日：1987-11-26

申请号：DE3626922

申请日：1986-08-08

Applicant: FUSION SYSTEMS CORP

Inventor： URY MICHAEL G ,  LYNCH DONALD ,  KAMAREHI MOHAMMAD ,  WOOD CHARLES H

IPC: F21S2/00 ,  H01J65/04 ,  H01P1/208 ,  H05B41/24 ,  H01J23/36 ,  H01P7/06

Abstract: The invention relates to a light source which has no electrodes and is supplied with microwaves, and in which a relatively high energy level is coupled to the bulb. This is achieved in that a plurality of energy oscillation types, which are essentially decoupled from one another, are produced in a microwave cavity.