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公开(公告)号:JPH10228886A
公开(公告)日:1998-08-25
申请号:JP3726598
申请日:1998-02-19
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24
Abstract: PROBLEM TO BE SOLVED: To generate light provided with a smooth spectral distribution in a visible light range so as to improve a color rendering property index by using a sulfur element, a selenium element, or a compound consisting of these elements as a filler of a lamp covered body, impressing electromagnetic radiation to a bulb so as to turn the filler into a plasma condition, and generating light by means of molecular radiation. SOLUTION: A lamp device 2, which is an electrodes lamp, is driven by means of microwave energy, and a filler inside the electrodless bulb (covered body) 3 contains a sulfur element, a selenium element, or one compound consisting of these elements. When the filler inside the non-electrode bulb 3 is excited by means of microwave energy so as to be turned into a plasma condition, light is generated by means of the filler so as to be taken out to the outside of a cavity via a mesh 5. In this way, light radiation dependent on molecular radiation inside a visible light area can be carried out and spectral luminous efficiency can be improved, while a small size high power light source emitting visible light can be accomplished.
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公开(公告)号:EP0663139A4
公开(公告)日:1997-03-19
申请号:EP93923758
申请日:1993-09-30
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , WOOD CHARLES H , KAMAREHI MOHAMMED , SIMPSON JAMES E , TURNER BRIAN , PREMYSLER PHILIP A , URY MICHAEL G
IPC: H01J7/46 , G03F7/20 , H01J11/04 , H01J17/20 , H01J61/02 , H01J61/12 , H01J61/30 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H05B41/36 , H05B41/16 , H01J1/02 , H01J11/00
CPC classification number: G03F7/70016 , H01J61/025 , H01J61/12 , H01J61/30 , H01J61/52 , H01J61/54 , H01J65/04 , H01J65/044 , H05B41/24
Abstract: An electrodeless lamp comprises an envelope (12) containing a plasma forming fill which includes at least one of sulfur and selenium when excited which emits principally visible light, which is in the form of molecular radiation. The envelope (12) has a diameter of less than one half inch. Means (1) are provided for generating electromagnetic energy. Further means (2, 3, 4, 5, 6) are provided for coupling said electromagnetic energy to said envelope to excite said fill, which in the absence of envelope rotation or with rotation at an insufficient speed, forms a discharge (14) which does not substantially fill the interior volume of said envelope (12). By additional means (13) the envelope (12) is rotated at a fast enough rate so as to cause the discharge (15) formed by the fill to substantially fill the interior volume of the envelope (12).
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公开(公告)号:EP0554350A4
公开(公告)日:1994-08-24
申请号:EP91919776
申请日:1991-10-24
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18
CPC classification number: G03F7/70016 , H01J61/025 , H01J61/12 , H01J61/38 , H01J61/54 , H01J65/042 , H01J65/044
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
Abstract translation: 公开了可以是无电极或弧光灯的高功率灯(2)。 灯含有硒或硫的填充物和少量的稀有气体(例如氩气或氙气)。
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公开(公告)号:ES2101759T3
公开(公告)日:1997-07-16
申请号:ES91919776
申请日:1991-10-24
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18 , H01J61/22
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
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公开(公告)号:CA2133344A1
公开(公告)日:1993-10-28
申请号:CA2133344
申请日:1993-04-13
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , TURNER BRIAN , WAYMOUTH JOHN F
IPC: H01J61/18 , G03F7/20 , H01J7/24 , H01J9/395 , H01J61/02 , H01J61/04 , H01J61/12 , H01J61/20 , H01J61/24 , H01J61/38 , H01J61/52 , H01J61/54 , H01J61/82 , H01J61/88 , H01J65/04
Abstract: 2133344 9321655 PCTABS00027 The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkali metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.
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公开(公告)号:DE4302555A1
公开(公告)日:1993-09-30
申请号:DE4302555
申请日:1993-01-29
Applicant: FUSION SYSTEMS CORP
Inventor: TURNER BRIAN , DOLAN JAMES T
Abstract: (A) An electrode-less lamp bulb consists of an envelope, which has no internal or external electrodes and which is transparent to UV radiation, and an envelope filling contg. a halogen in amount to give a halogen pressure of more than 350 Torr at the operating temp. (B) A microwave-powered excimer lamp has a microwave energy supply, a device for coupling microwave energy to excite an envelope filling, a grid system for blocking microwave energy during radiation emission from the lamp and one of (i) a filled lamp enevlope as described above; (ii) an envelope having a filling contg. a halogen and a noble gas, the filling pressure being more than 2.5 atmos. at the operating temp,; (iii) an envelope with a halogen filling of more than 350 Torr pressure at the operating temp; or (iv) an envelope with a filling of a noble gas and a halogen, the halogen pressure being more than 350 Torr at the operating temp. (C) An electrically powered excimer lamp having an UV transparent envelope, with a filling contg. a halogen at more than 350 Torr pressure at the operating temp., and a system for coupling electrical energy with the envelope to excite the filling. USE/ADVANTAGE - The lamps are excimer lamps useful for UV treatment of photo-treatable coatings, e.g. on flat or curved substrates (e.g. cans) or in photolithography for IC mfr. They produce UV radiation concentrated in the 250-300nm range with increased efficiency (e.g. 14.6%).
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公开(公告)号:DK0554350T3
公开(公告)日:1997-09-22
申请号:DK91919776
申请日:1991-10-24
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18 , H01J61/22
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
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公开(公告)号:AT151201T
公开(公告)日:1997-04-15
申请号:AT91919776
申请日:1991-10-24
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18 , H01J61/22
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
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公开(公告)号:BR9107033A
公开(公告)日:1994-03-22
申请号:BR9107033
申请日:1991-10-24
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
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公开(公告)号:GR3023695T3
公开(公告)日:1997-09-30
申请号:GR970401335
申请日:1997-06-05
Applicant: FUSION SYSTEMS CORP
Inventor: DOLAN JAMES T , URY MICHAEL G , WOOD CHARLES H , WAYMOUTH JOHN F
IPC: G03F7/20 , H01J17/20 , H01J61/02 , H01J61/073 , H01J61/12 , H01J61/38 , H01J61/52 , H01J61/54 , H01J65/04 , H05B41/24 , H01J61/18
Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).
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