公开(公告)号：EP0663139A4

公开(公告)日：1997-03-19

申请号：EP93923758

申请日：1993-09-30

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  WOOD CHARLES H ,  KAMAREHI MOHAMMED ,  SIMPSON JAMES E ,  TURNER BRIAN ,  PREMYSLER PHILIP A ,  URY MICHAEL G

IPC: H01J7/46 ,  G03F7/20 ,  H01J11/04 ,  H01J17/20 ,  H01J61/02 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H05B41/36 ,  H05B41/16 ,  H01J1/02 ,  H01J11/00

CPC classification number: G03F7/70016 ,  H01J61/025 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/044 ,  H05B41/24

Abstract: An electrodeless lamp comprises an envelope (12) containing a plasma forming fill which includes at least one of sulfur and selenium when excited which emits principally visible light, which is in the form of molecular radiation. The envelope (12) has a diameter of less than one half inch. Means (1) are provided for generating electromagnetic energy. Further means (2, 3, 4, 5, 6) are provided for coupling said electromagnetic energy to said envelope to excite said fill, which in the absence of envelope rotation or with rotation at an insufficient speed, forms a discharge (14) which does not substantially fill the interior volume of said envelope (12). By additional means (13) the envelope (12) is rotated at a fast enough rate so as to cause the discharge (15) formed by the fill to substantially fill the interior volume of the envelope (12).

公开(公告)号：HUT70733A

公开(公告)日：1995-10-30

申请号：HU9500854

申请日：1993-09-30

Applicant: FUSION SYSTEMS CORP

Inventor： WOOD CHARLES H ,  DOLAN JAMES T ,  TURNER BRIAN ,  KAMAREHI MOHAMMED ,  SIMPSON JAMES E ,  PREMYSLER PHILIP A

IPC: H01J7/46 ,  G03F7/20 ,  H01J11/04 ,  H01J17/20 ,  H01J61/02 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H05B41/36 ,  H05B41/16 ,  H04J11/00 ,  H04J1/02

Abstract: An electrodeless lamp comprises an envelope (12) containing a plasma forming fill which includes at least one of sulfur and selenium when excited which emits principally visible light, which is in the form of molecular radiation. The envelope (12) has a diameter of less than one half inch. Means (1) are provided for generating electromagnetic energy. Further means (2, 3, 4, 5, 6) are provided for coupling said electromagnetic energy to said envelope to excite said fill, which in the absence of envelope rotation or with rotation at an insufficient speed, forms a discharge (14) which does not substantially fill the interior volume of said envelope (12). By additional means (13) the envelope (12) is rotated at a fast enough rate so as to cause the discharge (15) formed by the fill to substantially fill the interior volume of the envelope (12).

公开(公告)号：HUT68508A

公开(公告)日：1995-06-28

申请号：HU9402942

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHALES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

公开(公告)号：CA2144978A1

公开(公告)日：1994-04-14

申请号：CA2144978

申请日：1993-09-30

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  WOOD CHARLES H ,  KAMAREHI MOHAMMED ,  SIMPSON JAMES E ,  TURNER BRIAN ,  PREMYSLER PHILIP A

IPC: H01J7/46 ,  G03F7/20 ,  H01J11/04 ,  H01J17/20 ,  H01J61/02 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H05B41/36

Abstract: An electrodeless lamp bulb (12) is rotated at sufficient rate to obviate isolated discharges. A coaxially excited electrodeless lamp bulb (12) is rotated in such manner that different regions of the bulb are near the high field region caused by the inner coaxial conductor, thus preventing are attachment from occurring. An electrodeless lamp bulb (12) is rotated at a high speed sufficient to improve lamp efficiency and reduce cooling requirement. An electrodeless lamp bulb (12) is provided with wall of reduced thickness at the area of the bulb (12) where it is desired to condense the fill upon turning off the power, thus providing for quicker starting.

公开(公告)号：HU9500854D0

公开(公告)日：1995-05-29

申请号：HU9500854

申请日：1993-09-30

Applicant: FUSION SYSTEMS CORP

Inventor： WOOD CHARLES H ,  DOLAN JAMES T ,  TURNER BRIAN ,  KAMAREHI MOHAMMED ,  SIMPSON JAMES E ,  PREMYSLER PHILIP A

IPC: H01J7/46 ,  G03F7/20 ,  H01J11/04 ,  H01J17/20 ,  H01J61/02 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H05B41/36

Abstract: An electrodeless lamp comprises an envelope (12) containing a plasma forming fill which includes at least one of sulfur and selenium when excited which emits principally visible light, which is in the form of molecular radiation. The envelope (12) has a diameter of less than one half inch. Means (1) are provided for generating electromagnetic energy. Further means (2, 3, 4, 5, 6) are provided for coupling said electromagnetic energy to said envelope to excite said fill, which in the absence of envelope rotation or with rotation at an insufficient speed, forms a discharge (14) which does not substantially fill the interior volume of said envelope (12). By additional means (13) the envelope (12) is rotated at a fast enough rate so as to cause the discharge (15) formed by the fill to substantially fill the interior volume of the envelope (12).

公开(公告)号：HU9402942D0

公开(公告)日：1995-02-28

申请号：HU9402942

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHALES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

公开(公告)号：AU3977193A

公开(公告)日：1993-11-18

申请号：AU3977193

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

公开(公告)号：CA2133344A1

公开(公告)日：1993-10-28

申请号：CA2133344

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

Abstract: 2133344 9321655 PCTABS00027 The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkali metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.

公开(公告)号：DE4302555A1

公开(公告)日：1993-09-30

申请号：DE4302555

申请日：1993-01-29

Applicant: FUSION SYSTEMS CORP

Inventor： TURNER BRIAN ,  DOLAN JAMES T

IPC: F21S2/00 ,  G03F7/20 ,  H01J61/12 ,  H01J61/82 ,  H01J65/04 ,  H05B41/24 ,  H05B41/28 ,  H01J61/16

Abstract: (A) An electrode-less lamp bulb consists of an envelope, which has no internal or external electrodes and which is transparent to UV radiation, and an envelope filling contg. a halogen in amount to give a halogen pressure of more than 350 Torr at the operating temp. (B) A microwave-powered excimer lamp has a microwave energy supply, a device for coupling microwave energy to excite an envelope filling, a grid system for blocking microwave energy during radiation emission from the lamp and one of (i) a filled lamp enevlope as described above; (ii) an envelope having a filling contg. a halogen and a noble gas, the filling pressure being more than 2.5 atmos. at the operating temp,; (iii) an envelope with a halogen filling of more than 350 Torr pressure at the operating temp; or (iv) an envelope with a filling of a noble gas and a halogen, the halogen pressure being more than 350 Torr at the operating temp. (C) An electrically powered excimer lamp having an UV transparent envelope, with a filling contg. a halogen at more than 350 Torr pressure at the operating temp., and a system for coupling electrical energy with the envelope to excite the filling. USE/ADVANTAGE - The lamps are excimer lamps useful for UV treatment of photo-treatable coatings, e.g. on flat or curved substrates (e.g. cans) or in photolithography for IC mfr. They produce UV radiation concentrated in the 250-300nm range with increased efficiency (e.g. 14.6%).

公开(公告)号：DE4307946A1

公开(公告)日：1993-09-16

申请号：DE4307946

申请日：1993-03-12

Applicant: FUSION SYSTEMS CORP

Inventor： SIMPSON JAMES E ,  KAMATEHI MOHAMMED ,  TURNER BRIAN ,  URY MICHAEL G

IPC: H01J65/04 ,  H05B41/24 ,  H05H1/46

Abstract: The microwave supplied lamp has a tube (2) within a discharge cavity (1) at the point of highest field strength. The presence of the tube changes the field within the space. The central region (3) of the lower wall is formed by a wire mesh (3). A waveguide (4) is coupled to the space and has a slot shaped coupling aperture (5). The waveguide can also be located on the top surface. The discharge tube is made of quartz and has reflectors (8, 8') on both sides. The end of the unit has a location provided for a magnetron unit (6), supplying the lamp with energy. USE/ADVANTAGE - For incoherent optical radiation. Covers wide wave-band, from ultraviolet to visible or infrared range. Provides uniform discharge along wave-band. Lamp is uniformly excitable.