公开(公告)号：US06956223B2

公开(公告)日：2005-10-18

申请号：US10119290

申请日：2002-04-10

Applicant: Theodore H. Smick ,  Frank D. Roberts ,  Marvin Farley ,  Geoffrey Ryding ,  Takao Sakase ,  Adrian Murrell ,  Peter Edwards ,  Bernard Harrison

Inventor： Theodore H. Smick ,  Frank D. Roberts ,  Marvin Farley ,  Geoffrey Ryding ,  Takao Sakase ,  Adrian Murrell ,  Peter Edwards ,  Bernard Harrison

IPC: H01J37/04 ,  H01J37/18 ,  H01J37/317 ,  H01L21/265 ,  H01L21/68 ,  B05C5/00

CPC classification number: H01J37/20 ,  H01J37/18 ,  H01J37/3171 ,  H01J2237/20 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/20221 ,  H01J2237/20228 ,  H01J2237/20278 ,  H01L21/682 ,  H01L21/6835

Abstract: Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180, in at least two generally orthogonal directions (so-called X-Y scanning). Scanning in a first direction is longitudinally through an aperture 55 in a vacuum chamber wall. The arm 60 is reciprocated by one or more linear motors 90A, 90B. The arm 60 is supported relative to a slide 100 using gimballed air bearings so as to provide cantilever support for the arm relative to the slide 100. A compliant feedthrough 130 into the vacuum chamber for the arm 60 then acts as a vacuum seal and guide but does not itself need to provide bearing support. A Faraday 450 is attached to the arm 60 adjacent the substrate holder 180 to allow beam profiling to be carried out both prior to and during implant. The Faraday 450 can instead or additionally be mounted adjacent the rear of the substrate holder or at 90° to it to allow beam profiling to be carried out prior to implant, with the substrate support reversed or horizontal and out of the beam line.

Abstract translation: 公开了半导体处理装置，其提供基板或晶片保持器180的扫描臂60在至少两个大致正交的方向（所谓的X-Y扫描）上的移动。 沿着第一方向进行的扫描纵向地穿过真空室壁中的孔口55。 臂60由一个或多个线性电动机90A，90B往复运动。臂60相对于滑块100被支撑，使用支撑的空气轴承，以便相对于滑块100为臂提供悬臂支撑。 进入用于臂60的真空室中的柔性馈通件130然后用作真空密封和引导件，但本身不需要提供轴承支撑件。 法拉第450附接到靠近基板保持器180的臂60，以允许在植入之前和期间执行光束轮廓。 法拉第450可以替代地或附加地安装在靠近衬底保持器的后部或与其相邻的90°处，以允许在植入之前执行光束轮廓，其中衬底支撑件反向或水平并且离开光束线。

公开(公告)号：US4803754A

公开(公告)日：1989-02-14

申请号：US46156

申请日：1987-05-05

Applicant: Frank D. Roberts

Inventor： Frank D. Roberts

IPC: E05F3/22 ,  E05F3/00

CPC classification number: E05F3/222 ,  E05F2003/228 ,  E05Y2201/462 ,  E05Y2201/474 ,  E05Y2900/132 ,  Y10S16/10 ,  Y10S16/17 ,  Y10T16/27

Abstract: A door holder-closer comprising a conventional door closer and a novel electromechanical door holder attached to the drive spindle of the door closer. The door holder features a lever which is coupled to the drive spindle of the door closer by an adjustable clamp comprising mating rotor and cone elements. Both the rotor and the cone are seated over the drive spindle with the cone being fixed to the spindle. The rotor is formed with a projecting rotor tab which is selectively engaged by a pawl. The lever is formed with a notch which selectively engages a roller driven by an electromagnet-actuated armature. The motion of the door closer spindle is restrained by a primary latch formed when the roller is seated within the lever notch in response to an energized electromagnet, and by a secondary latch formed when the pawl engages the rotor tab. The primary latch supports and controls the secondary latch. Hold-open door control occurs when both latches are in effect concurrently. If the primary latch is broken, either in response to deenergization of the electromagnet or the application of a manual overriding force on the controlled door, the secondary latch is automatically released and the hold-open mode terminates. The hold-open mechanism, which has as its principal components the rotor-cone clamp, the pawl-rotor latch and the electromagnetically actuated lever-roller latch, may be fabricated as a separate and integral unit that is simply seated upon the door-closer drive spindle to add a door-hold function to the door closer.

Abstract translation: 一种门保持器，包括常规的门关闭器和附接到门关闭器的驱动主轴的新型机电门保持器。 门保持器具有杠杆，该杠杆通过包括配合的转子和锥形元件的可调节夹具联接到门关闭器的驱动主轴。 转子和锥体都位于驱动主轴上，锥体固定在主轴上。 转子形成有突出的转子凸片，其被棘爪选择性地接合。 杠杆形成有凹口，其选择性地接合由电磁铁驱动的电枢驱动的辊。 通过响应于通电的电磁体而将辊安置在杠杆槽口内时形成的主闩锁以及当棘爪接合转子翼片时形成的辅助闩锁来限制门关闭主轴的运动。 主闩锁支持和控制辅助锁存器。 当两个锁存器同时有效时，就会发生开门控制。 如果主闩锁断裂，或者响应于电磁铁的断电或在受控的门上施加手动超控力，则辅助闩锁被自动释放并且保持打开模式终止。 作为其主要部件的转子锥形夹具，棘爪转子闩锁和电磁致动的杠杆辊闩锁的保持开启机构可以被制造为单独的并且整体的单元，其被简单地安置在闭门器上 驱动主轴向门关闭器增加门保持功能。