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1.发明授权Probe card and method of testing wafer having a plurality of semiconductor devices 有权探针卡和方法，用于测试具有许多半导体器件的半导体晶片
公开(公告)号：EP1077381B1
公开(公告)日：2009-06-03
申请号：EP00114105.0
申请日：2000-07-10
Applicant: Fujitsu Microelectronics Limited
Inventor： Maruyama, Shigeyuki , Koizumi, Daisuke , Watanabe, Naoyuki , Konno, Yoshito , Yoshida, Eiji , Honda, Toshiyuki , Kawahara, Toshimi , Nagashige, Kenichi
IPC: G01R1/073 , G01R31/316
CPC classification number: G01R31/2886 , H01L2224/05001 , H01L2224/05008 , H01L2224/05022 , H01L2224/05024 , H01L2224/05568 , H01L2224/05569 , H01L2224/05573 , H01L2224/11 , H05K3/326
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