公开(公告)号：EP1567580A4

公开(公告)日：2008-04-30

申请号：EP03768557

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： KOHL PAUL A ,  ALLEN SUEANN BIDSTRUP ,  HENDERSON CLIFFORD LEE ,  JAYACHANDRAN JOSEPH PAUL ,  REED HOLLIC KELLEHER ,  WHITE CELESTA E

IPC: B81B1/00 ,  B81C1/00 ,  H01L21/768 ,  C08J3/28 ,  G03C1/76 ,  G03C1/795 ,  G03C5/00 ,  G03C5/56

CPC classification number: B81C1/00476 ,  B81C2201/0108 ,  H01L21/7682 ,  Y10S430/114

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.