公开(公告)号：WO2004042797A3

公开(公告)日：2005-07-07

申请号：PCT/US0334705

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： KOHL PAUL A ,  ALLEN SUEANN BIDSTRUP ,  HENDERSON CLIFFORD LEE ,  JAYACHANDRAN JOSEPH PAUL ,  REED HOLLIE ,  WHITE CELESTA E

IPC: B81B1/00 ,  B81C1/00 ,  H01L21/768 ,  C08J3/28 ,  G03C1/76 ,  G03C1/795 ,  G03C5/00 ,  G03C5/56

CPC classification number: B81C1/00476 ,  B81C2201/0108 ,  H01L21/7682 ,  Y10S430/114

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.

Abstract translation: 提供聚合物，其使用方法及其分解方法。 一个示例性的聚合物，其中包括具有牺牲聚合物和光致酸产生剂的组合物。

公开(公告)号：EP1567580A4

公开(公告)日：2008-04-30

申请号：EP03768557

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： KOHL PAUL A ,  ALLEN SUEANN BIDSTRUP ,  HENDERSON CLIFFORD LEE ,  JAYACHANDRAN JOSEPH PAUL ,  REED HOLLIC KELLEHER ,  WHITE CELESTA E

IPC: B81B1/00 ,  B81C1/00 ,  H01L21/768 ,  C08J3/28 ,  G03C1/76 ,  G03C1/795 ,  G03C5/00 ,  G03C5/56

CPC classification number: B81C1/00476 ,  B81C2201/0108 ,  H01L21/7682 ,  Y10S430/114

Abstract: Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a pthotoacid generator.

公开(公告)号：AU2003291668A8

公开(公告)日：2004-06-07

申请号：AU2003291668

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： ALLEN SUEANN BIDSTRUP ,  WHITE CELESTA E ,  HENDERSON CLIFFORD LEE ,  JAYACHANDRAN JOSEPH PAUL ,  KOHL PAUL A ,  REED HOLLIE

IPC: B81B1/00 ,  B81C1/00 ,  H01L21/768 ,  C08J3/28 ,  G03C5/00 ,  G03C1/795 ,  G03C5/56 ,  G03C1/76

Abstract: Polymers, methods of use thereof, and methods for fabricating a structure having air-gaps, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a photoacid generator.

公开(公告)号：AU2003291668A1

公开(公告)日：2004-06-07

申请号：AU2003291668

申请日：2003-10-31

Applicant: GEORGIA TECH RES INST

Inventor： HENDERSON CLIFFORD LEE ,  JAYACHANDRAN JOSEPH PAUL ,  REED HOLLIE ,  WHITE CELESTA E ,  KOHL PAUL A ,  ALLEN SUEANN BIDSTRUP

IPC: B81B1/00 ,  B81C1/00 ,  H01L21/768

Abstract: Polymers, methods of use thereof, and methods for fabricating a structure having air-gaps, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a photoacid generator.