公开(公告)号：AU2003222674A1

公开(公告)日：2003-11-03

申请号：AU2003222674

申请日：2003-04-21

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： SPALLAS JAMES P ,  FERNANDEZ ANDRES ,  DEBEY THOMAS ,  MURAY LAWRENCE P

IPC: B81B3/00 ,  H01L21/00 ,  H01L21/30 ,  H01L21/302 ,  H01L21/46 ,  H01L21/461 ,  H01L21/76

公开(公告)号：AU2003256311A1

公开(公告)日：2004-01-19

申请号：AU2003256311

申请日：2003-06-24

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  SPALLAS JAMES P ,  MURAY LAWRENCE P ,  FERNANDEZ ANDRES

IPC: B81B3/00 ,  B81B7/00 ,  G02B26/08 ,  G02B7/182

Abstract: A MEMS device having a fixed element and a movable element wherein one or the other of the fixed element and the movable element has at least one radially-extended stop or overdeflection limiter. A fixed overlayer plate forms an aperture. The aperture is sized to minimize vignetting and may be beveled on the margin. Overdeflection limitation occurs during deflection before the movable element can impinge on an underlying electrode. The overdeflection limiter may be conveniently placed adjacent a gimbaled hinge.

公开(公告)号：AU2002361551A1

公开(公告)日：2003-04-22

申请号：AU2002361551

申请日：2002-07-22

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： FERNANDEZ ANDRES ,  MURAY LAWRENCE P ,  STAKER BRYAN P

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/00

Abstract: In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.

公开(公告)号：WO03031316A2

公开(公告)日：2003-04-17

申请号：PCT/US0223418

申请日：2002-07-22

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： MURAY LAWRENCE P ,  STAKER BRYAN P ,  FERNANDEZ ANDRES

IPC: B81B3/00 ,  G02B26/08 ,  B81B

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/042

Abstract: In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.

Abstract translation: 在静电控制装置中，例如具有围绕电极形成的空腔的MEMS阵列，其直接安装在电介质基底上，其中嵌入的静电致动电极与各个MEMS元件对准设置，提供了可控地中和多余电荷的机构 并且在MEMS元件和静电致动电极之间建立受控电位。