公开(公告)号：CA2668957A1

公开(公告)日：2008-05-22

申请号：CA2668957

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： OWENS WINDSOR E ,  KINDWALL ALEXANDER P ,  FERNANDEZ ANDRES ,  STAKER BRYAN P

IPC: H01L21/00

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or s ome of the elements to be bonded. These cavities serve as receptacles for th e bonding material and are where the bonds are localized. The cavities are o f sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements ar e brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mat ed with nominally zero separation. Once solidified, the bonding material for ms a localized bond inside each cavity. Different cavity shapes, such as, re ctangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

公开(公告)号：CA2478213A1

公开(公告)日：2003-09-18

申请号：CA2478213

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： FERNANDEZ ANDRES ,  DICKSON WILLIAM C

IPC: G02B26/08 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

Abstract: Apparatus and methods are provided for driving a two-axis ~X-Y~ MEMS mirror using three (1, 2, 3) non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：CA2478213C

公开(公告)日：2009-11-17

申请号：CA2478213

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： DICKSON WILLIAM C ,  FERNANDEZ ANDRES

IPC: G02B26/08 ,  H02N1/00 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10

Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi--directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：AU2003222674A1

公开(公告)日：2003-11-03

申请号：AU2003222674

申请日：2003-04-21

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： SPALLAS JAMES P ,  FERNANDEZ ANDRES ,  DEBEY THOMAS ,  MURAY LAWRENCE P

IPC: B81B3/00 ,  H01L21/00 ,  H01L21/30 ,  H01L21/302 ,  H01L21/46 ,  H01L21/461 ,  H01L21/76

公开(公告)号：HK1217543A1

公开(公告)日：2017-01-13

申请号：HK16105471

申请日：2016-05-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： FERNANDEZ ANDRES ,  DICKSON WILLIAM C C

IPC: G02B26/08 ,  G05D20060101 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

公开(公告)号：CA2668956C

公开(公告)日：2010-11-09

申请号：CA2668956

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/00 ,  B81B7/02

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

公开(公告)号：CA2668956A1

公开(公告)日：2008-05-22

申请号：CA2668956

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： OWENS WINDSOR E ,  FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P

IPC: G02B26/00 ,  H01L27/00

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. Th e MEMS-based mirror, thus avoids voltage drifts and has an improved mirror p osition stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined lim its. An insulating layer, such as silicon dioxide, electrically isolates eac h pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimen sions.

公开(公告)号：AU2003216497A8

公开(公告)日：2003-09-22

申请号：AU2003216497

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： DICKSON WILLIAM C ,  FERNANDEZ ANDRES

IPC: G02B26/08 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：AU2003216497A1

公开(公告)日：2003-09-22

申请号：AU2003216497

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： FERNANDEZ ANDRES ,  DICKSON WILLIAM C

IPC: G02B26/08 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：HK1139742A1

公开(公告)日：2010-09-24

申请号：HK10105875

申请日：2010-06-11

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B20060101 ,  H01L20060101

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.