公开(公告)号：WO2002089168A2

公开(公告)日：2002-11-07

申请号：PCT/US2002/012258

申请日：2002-04-16

Applicant: HEWLETT-PACKARD COMPANY

Inventor： CHEN, Zhizhang ,  BICE, Michael, David ,  ENCK, Ronald, L. ,  REGAN, Michael, J. ,  NOVET, Thomas ,  BENNING, Paul, J.

IPC: H01J1/312

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J9/022

Abstract: An emitter (50, 100) has an electron supply layer (10) and a silicon-based dielectric layer (20) formed on the electron supply layer (10). The silicon-based dielectric layer (20) is preferably less than about 500 Angstroms. Optionally, an insulator layer (78) is formed on the electron supply layer (10) and has openings defined within in which the silicon-based dielectric layer (20) is formed. A cathode layer (14) is formed on the silicon-based dielectric layer (20) to provide a surface for energy emissions (22) of electrons (16) and/or photons (18). Preferably, the emitter (50,100) is subjected to an annealing process (120,122) thereby increasing the supply of electrons (16) tunneled from the electron supply layer (10) to the cathode layer (14).

Abstract translation: 发射极（50,100）具有形成在电子供给层（10）上的电子供给层（10）和硅基电介质层（20）。 硅基电介质层（20）优选小于约500埃。 可选地，绝缘体层（78）形成在电子供应层（10）上并且具有限定在其内形成有硅基电介质层（20）的开口。 在硅基电介质层（20）上形成阴极层（14）以提供用于电子（16）和/或光子（18）的能量发射（22）的表面。 优选地，对发射极（50,100）进行退火处理（120,122），从而增加从电子供给层（10）向阴极层（14）隧穿的电子（16）的供应。

公开(公告)号：WO2003065425A2

公开(公告)日：2003-08-07

申请号：PCT/US2003/002955

申请日：2003-01-30

Applicant: HEWLETT-PACKARD COMPANY

Inventor： CHEN, Zhizhang ,  BENNING, Paul, J. ,  RAMAMOORTHI, Sriram ,  NOVET, Thomas

IPC: H01L21/00

CPC classification number: B82Y10/00 ,  G11C11/23 ,  H01J1/312 ,  H01J9/025

Abstract: An emitter (50,100) includes an electron supply (60) and a tunneling layer (20) disposed on the electron supply. A cathode layer (14) is disposed on the tunneling layer. A conductive electrode (53) has multiple layers of conductive material (52,54). The multiple layers include a protective layer (54) disposed on the cathode layer. The conductive electrode has been etched to define an opening (26) thereby exposing a portion of the cathode layer.

Abstract translation: 发射极（50,100）包括设置在电子源上的电子源（60）和隧穿层（20）。 阴极层（14）设置在隧道层上。 导电电极（53）具有多层导电材料（52,54）。 多层包括设置在阴极层上的保护层（54）。 已经蚀刻导电电极以限定开口（26），从而暴露阴极层的一部分。

公开(公告)号：WO2002103740A3

公开(公告)日：2002-12-27

申请号：PCT/US2002/018474

申请日：2002-06-10

Applicant: HEWLETT-PACKARD COMPANY

Inventor： BENNING, Paul, J. ,  KNIGHT, William, R. ,  REGAN, Michael, J.

IPC: H01J3/02

Abstract: An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (1O). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode ö(30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nonometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens.

公开(公告)号：WO2003065425A3

公开(公告)日：2003-08-07

申请号：PCT/US2003/002955

申请日：2003-01-30

Applicant: HEWLETT-PACKARD COMPANY

Inventor： CHEN, Zhizhang ,  BENNING, Paul, J. ,  RAMAMOORTHI, Sriram ,  NOVET, Thomas

IPC: H01J1/312

Abstract: An emitter (50,100) includes an electron supply (60) and a tunneling layer (20) disposed on the electron supply. A cathode layer (14) is disposed on the tunneling layer. A conductive electrode (53) has multiple layers of conductive material (52,54). The multiple layers include a protective layer (54) disposed on the cathode layer. The conductive electrode has been etched to define an opening (26) thereby exposing a portion of the cathode layer.

公开(公告)号：EP1396005A2

公开(公告)日：2004-03-10

申请号：EP02737464.4

申请日：2002-06-10

Applicant: Hewlett-Packard Company

Inventor： BENNING, Paul, J. ,  KNIGHT, William, R. ,  REGAN, Michael, J.

IPC: H01J3/02

CPC classification number: B82Y10/00 ,  G11B9/10 ,  G11B9/14 ,  G11B9/1418 ,  G11C11/23 ,  H01J3/022

Abstract: An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (1O). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode ö(30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nonometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens.

公开(公告)号：EP1384243A2

公开(公告)日：2004-01-28

申请号：EP02721776.9

申请日：2002-04-16

Applicant: Hewlett-Packard Company

Inventor： CHEN, Zhizhang ,  BICE, Michael, David ,  ENCK, Ronald, L. ,  REGAN, Michael, J. ,  NOVET, Thomas ,  BENNING, Paul, J.

IPC: H01J1/312 ,  H01J9/02

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J9/022

Abstract: An emitter (50, 100) has an electron supply layer (10) and a silicon-based dielectric layer (20) formed on the electron supply layer (10). The silicon-based dielectric layer (20) is preferably less than about 500 Angstroms. Optionally, an insulator layer (78) is formed on the electron supply layer (10) and has openings defined within in which the silicon-based dielectric layer (20) is formed. A cathode layer (14) is formed on the silicon-based dielectric layer (20) to provide a surface for energy emissions (22) of electrons (16) and/or photons (18). Preferably, the emitter (50,100) is subjected to an annealing process (120,122) thereby increasing the supply of electrons (16) tunneled from the electron supply layer (10) to the cathode layer (14).

公开(公告)号：EP1396005B1

公开(公告)日：2006-10-04

申请号：EP02737464.4

申请日：2002-06-10

Applicant: Hewlett-Packard Company

Inventor： BENNING, Paul, J. ,  KNIGHT, William, R. ,  REGAN, Michael, J.

IPC: H01J3/02 ,  G11B9/10

CPC classification number: B82Y10/00 ,  G11B9/10 ,  G11B9/14 ,  G11B9/1418 ,  G11C11/23 ,  H01J3/022

Abstract: An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (1O). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode ö(30). The first (38) and second (34) openings are chosen based on the first voltage, the second voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nanometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens. An electron lens is used for focusing electrons from a cathode (10) to an anode (30). The lens includes a first conductive layer (36) with a first opening (38) at a first distance (48) from the cathode (10). The first conductive layer (36) is held at a first voltage. The lens also includes a second conductive layer (32) with a second opening (34) at a second distance (46) from the first conductive layer (36) and a third distance (24) from the anode (30). The second conductive shield layer (32) is held at a second voltage substantially equal to the voltage of the anode (30). The first (38) and second (34) openings are chosen based on the first voltage, the first distance (48), the second distance (46) and the third distance (24). The opening focuses the electrons emitted from the cathode (10) onto the anode (30) to a spot size preferably less than 40 nonometers. The force created between the cathode (10) and anode (30) is minimized by the structure of the lens.