POSITIVE-WORKING RADIATION-SENSITVE MIXTURE, AND RADIATION-SENSITIVE RECORDING MATERIAL PRODUCED WITH THIS MIXTURE

    公开(公告)号:CA2066148A1

    公开(公告)日:1992-10-21

    申请号:CA2066148

    申请日:1992-04-15

    Applicant: HOECHST AG

    Abstract: A positive-working, radiation-sensitive mixture containing a) a compound which generates a strong acid under the action of actinic radiation, b) a compound having at least one C-O-C or C-O-Si bond cleavable by acid and c) a polymeric binder which is insoluble in water and soluble or at least swellable in aqueous alkaline solutions, wherein the compound (a) is a 1,3,5- or 1,2,4-tri-hydroxybenzene or a 1,2,3-, 1,3,5- or 1,2,4-trihydroxy-benzene substituted on the aromatic ring by a radical R'; or a polymer containing a dihydroxy-phenoxy radical or a polymer containing a trihydxoxy phenylene radical; wherein the hydroxybenzene or hydroxy-containing polymer is partially or fully esterified with sulfonic acids of the formula R-SO3H, is distinguished by high resolution and high sensitivity over a wide spectral range. It also shows high thermal stability and does not form any corrosive photolysis products on exposure. A radiationsensitive recording material which has been produced with mixture is suitable for the production of photoresists, electronic components, printing plates, or for chemical milling.

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