公开(公告)号：WO1997045861A1

公开(公告)日：1997-12-04

申请号：PCT/EP1997002778

申请日：1997-05-28

Applicant: HOLTRONIC TECHNOLOGIES LTD. ,  MAYER, Herbert

Inventor： HOLTRONIC TECHNOLOGIES LTD.

IPC: H01L21/00

CPC classification number: H01L21/68707

Abstract: A device for gripping and holding a substrate comprises at least two clamping parts (15, 17). The first clamping part (15) is arranged a distance apart from the second clamping part (17). First and second clamping parts (15, 17) are movable relative to each other along a longitudinal axis (20) so that they can grip and clamp a substrate (13) at opposite edges. In a preferred embodiment the clamping parts (15, 17) are formed by rollers. At least the rollers (17) are rotatable about an axis perpendicular to the plane of the substrate (13) to be gripped in order to allow a rotation of the substrate (13) when it is gripped. The device has the advantage that the substrate, when it is gripped, takes always a centered and well defined position.

Abstract translation: 夹持和保持基底的装置包括至少两个夹紧部分（15,17）。 第一夹紧部件（15）布置成与第二夹紧部件（17）隔开一段距离。 第一和第二夹持部分（15,17）可以沿着纵向轴线（20）相对于彼此移动，使得它们可以在相对的边缘处夹持和夹紧基底（13）。 在优选实施例中，夹紧部件（15,17）由辊形成。 至少辊（17）可以围绕垂直于衬底（13）的平面的轴线旋转以被夹持，以便当被抓握时允许衬底（13）的旋转。 该装置的优点在于，当夹持基板时，基板始终处于中心和明确定位的位置。

公开(公告)号：WO1997044816A1

公开(公告)日：1997-11-27

申请号：PCT/EP1997002561

申请日：1997-05-20

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： HOLTRONIC TECHNOLOGIES LTD. ,  MAYER, Herbert

IPC: H01L21/00

CPC classification number: G03F9/00 ,  B23Q1/34 ,  B25B11/005 ,  B65G49/061 ,  B65G49/065 ,  B65G2249/04 ,  B65G2249/045 ,  C03B35/24 ,  C03B2225/02 ,  H01L21/6838

Abstract: The present invention relates to a method and apparatus for positioning a substrate, e.g. of a glass plate, on a support (11). For the formation of an air cushion the surface of the support is pressurized from below with a gas. The surface has grooves (27) and openings (15) which lie in the grooves (27). At the edge of the support (11) abutments (33), elastic means (39) and sensors (37) are provided. The latter are used for measuring the position of th substrate indirectly by determining the distance between the sensor head and the elastic means (39) which are formed by a leaf spring. The leaf spring (39) in its normal position projects the abutting means by a certain distance so that in the course of the alignment process the substrate pushes the leaf spring backwards.

Abstract translation: 本发明涉及一种用于定位衬底的方法和装置，例如， 的玻璃板上，在支撑件（11）上。 为了形成气垫，支撑体的表面用气体从下方加压。 表面具有凹槽（27）和位于凹槽（27）中的开口（15）。 在支撑件（11）的边缘（33）的边缘设有弹性装置（39）和传感器（37）。 后者用于通过确定由板簧形成的传感器头和弹性装置（39）之间的距离间接地测量第衬底的位置。 在其正常位置的板簧（39）将抵接装置突出一定距离，使得在对准过程中，基板向后推动板簧。