公开(公告)号：WO1997044816A1

公开(公告)日：1997-11-27

申请号：PCT/EP1997002561

申请日：1997-05-20

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： HOLTRONIC TECHNOLOGIES LTD. ,  MAYER, Herbert

IPC: H01L21/00

CPC classification number: G03F9/00 ,  B23Q1/34 ,  B25B11/005 ,  B65G49/061 ,  B65G49/065 ,  B65G2249/04 ,  B65G2249/045 ,  C03B35/24 ,  C03B2225/02 ,  H01L21/6838

Abstract: The present invention relates to a method and apparatus for positioning a substrate, e.g. of a glass plate, on a support (11). For the formation of an air cushion the surface of the support is pressurized from below with a gas. The surface has grooves (27) and openings (15) which lie in the grooves (27). At the edge of the support (11) abutments (33), elastic means (39) and sensors (37) are provided. The latter are used for measuring the position of th substrate indirectly by determining the distance between the sensor head and the elastic means (39) which are formed by a leaf spring. The leaf spring (39) in its normal position projects the abutting means by a certain distance so that in the course of the alignment process the substrate pushes the leaf spring backwards.

Abstract translation: 本发明涉及一种用于定位衬底的方法和装置，例如， 的玻璃板上，在支撑件（11）上。 为了形成气垫，支撑体的表面用气体从下方加压。 表面具有凹槽（27）和位于凹槽（27）中的开口（15）。 在支撑件（11）的边缘（33）的边缘设有弹性装置（39）和传感器（37）。 后者用于通过确定由板簧形成的传感器头和弹性装置（39）之间的距离间接地测量第衬底的位置。 在其正常位置的板簧（39）将抵接装置突出一定距离，使得在对准过程中，基板向后推动板簧。