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公开(公告)号：DE10196819T5
公开(公告)日：2004-04-15
申请号：DE10196819
申请日：2001-05-11
Applicant: HRL LAB LLC
Inventor： CLARK JUN WILLIAM M , BAUKUS JAMES P , CHOW LAP-WAI
IPC: H01L27/04 , H01L21/74 , H01L21/822 , H01L21/8234 , H01L27/02 , H01L27/088 , H01L21/768
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