公开(公告)号：US20250035096A1

公开(公告)日：2025-01-30

申请号：US18715904

申请日：2022-11-14

Applicant: Hitachi High-Tech Corporation

Inventor： Nobuhiro TSUKADA ,  Daisuke KANAI ,  Sho IWASA ,  Yushi HARADA ,  Yusuke YOTA

IPC: F04B23/06 ,  F04B51/00

Abstract: A liquid delivery pump delivers a liquid with high flow rate accuracy in consideration of solvent expansion, pressure dependent leakage of the solvent, and flow rate dependent leakage of the solvent. A liquid delivery pump includes first and second plunger pumps connected together, having respective first and second plungers. A pressure sensor measures a liquid delivery pressure (P2) from the second plunger pump, and a controller controls the driving of the first and second plungers. The controller obtains a moving speed (v1) of the first plunger and a moving speed (v2) of the second plunger using a parameter (C1, C0) depending on the liquid delivery pressures (P1, P2), the liquid delivery pressure, and a target flow rate of the liquid. The parameter (C1, C0) is a parameter of an expression representing a relationship between the liquid delivery pressure (P2) and a flow rate (Q0) of the liquid.

公开(公告)号：US20230384271A1

公开(公告)日：2023-11-30

申请号：US18032717

申请日：2021-10-12

Applicant: Hitachi High-Tech Corporation

Inventor： Nobuhiro TSUKADA ,  Daisuke AKIEDA ,  Sho IWASA ,  Yusuke YOTA ,  Yuichiro HASHIMOTO

IPC: G01N30/32 ,  F04B23/06 ,  F04B49/06 ,  F04B51/00

CPC classification number: G01N30/32 ,  F04B23/06 ,  F04B49/06 ,  F04B51/00 ,  G01N2030/326

Abstract: Provided is a technology for reducing the capacity of a liquid feeding pump and enabling liquid feeding with little pulsation. A liquid feeding pump according to the present disclosure is provided with: a first plunger pump having a first plunger; a second plunger pump having a second plunger and connected in series with the first plunger pump; a pressure sensor disposed downstream of the second plunger pump; and a control unit that accepts the input of a liquid discharge pressure measured by the pressure sensor and that controls the driving of the first plunger and the driving of the second plunger. The control unit calculates the rate of change in the pressure of the liquid on the basis of the past compression distances of the plunger for when the liquid was compressed by the first plunger pump and the pressure at the completion of compression, predicts the compression distance of the first plunger on the basis of the rate of change in pressure and the present discharge pressure, and determines the timing at which the compression performed by the first plunger will be completed on the basis of the predicted compression distance.

公开(公告)号：US20230332586A1

公开(公告)日：2023-10-19

申请号：US17791593

申请日：2020-11-05

Applicant: Hitachi High-Tech Corporation

Inventor： Nobuhiro TSUKADA ,  Daisuke AKIEDA ,  Yuichiro HASHIMOTO ,  Sho IWASA ,  Yusuke YOTA

IPC: F04B23/06 ,  F04B49/06 ,  F04B49/08 ,  F04B49/20 ,  G01N30/32

CPC classification number: F04B23/06 ,  F04B49/065 ,  F04B49/08 ,  F04B49/20 ,  G01N30/32 ,  G01N2030/326

Abstract: The present invention provides a technique that enables liquid feeding with small pulsation by reducing the volume of a liquid feeding pump. Disclosed is a liquid feeding pump comprising: a first plunger pump that has a first plunger; a second plunger pump that has a second plunger and is connected to the first plunger pump in series; a pressure sensor that is disposed on the downstream side of the second plunger pump; and a control unit that accepts an input of the discharge pressure of a liquid measured by the pressure sensor to control driving of the first plunger and driving of the second plunger, wherein when the first plunger pump compresses the liquid, the control unit drives the first plunger at a first speed, and then decreases the speed to a second speed slower than the first speed before the compression is completed, and wherein the control unit discharges the liquid from the second plunger pump by driving the second plunger in parallel with the driving of the first plunger.