公开(公告)号：DE2613498A1

公开(公告)日：1976-10-28

申请号：DE2613498

申请日：1976-03-30

Applicant: IBM

Inventor： AHN MIE YEUNG ,  BAJOREK CHRISTOPHER HENRY ,  ROSENBERG ROBERT ,  TU KING NING

IPC: G11B5/66 ,  C01G49/02 ,  C23C14/08 ,  G11B5/64 ,  G11B5/73 ,  G11B5/738 ,  H01F10/18 ,  H01F10/20 ,  H01F41/14 ,  H01F41/18 ,  H01F41/28 ,  B01J17/30

Abstract: A first thin film of appropriate texture, lattice constant, and crystal structure, such as body centered cubic vanadium or chromium with (110) texture is deposited upon a rigid or flexible substrate forming a plurality of polycrystals. A ferrite such as magnetite (Fe3O4) is sputtered from a target onto the first thin film forming a mixture of gamma Fe2O3 and Fe3O4 substantially completely without formation of Fe or other oxides of iron, providing good magnetic characteristics and resistance to corrosion. The substrate temperature can be maintained as low as 200 DEG C for both steps when sputtering or evaporation is employed.