Abstract:
A semiconductor device having at least one FET and at least one Schottky barrier diode. The device has an FET with source and drain regions in a semiconductor body and a gate electrode. The Schottky barrier diode consists of a thin layer of polycrystalline material separated from the semiconductor body by an insulating amorphous layer, an ohmic contact, and a barrier contact. The combination is particularly useful in fabricating logic and memory devices where the Schottky barrier diode is utilized as a resistance element and/or as an input output device. In the method of producing the device, a polysilicon layer is used to fabricate both the gate electrode and the Schottky barrier diode.
Abstract:
A method for manufacturing a high performance bipolar device and the resulting structure which has a very small emitter-base spacing is described. The small emitter-base spacing, reduces the base resistance compared to earlier device spacing and thereby improves the performance of the bipolar device. The method involves providing a silicon semiconductor body having regions of monocrystalline silicon isolated from one another by isolation regions and a buried subcollector therein. A base region is formed in the isolated monocrystalline silicon. A mask is formed on the surface of the silicon body covering those regions designated to be the emitter and collector reach-through regions. A doped polycrystalline silicon layer is then formed through the mask covering the base region and making ohmic contact thereto. An insulating layer is formed over the polysilicon layer. The mask is removed from those regions designated to be the emitter and collector reach-through regions. The emitter junction is then formed in the base region and the collector reach-through formed to contact the buried subcollector. Electrical contacts are made to the emitter and collector. The doped polycrystalline silicon layer is the electrical contact to the base regions.