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公开(公告)号：JPH0551175B2
公开(公告)日：1993-07-30
申请号：JP200587
申请日：1987-01-09
Applicant: IBM
Inventor： KARANAMU BARASABURAMANYAMU , ANSONII JON DARI , YAKOBU RAIZUMAN , SEIKI OGURA
IPC: H01L21/3205 , G03F7/09 , H01L21/027 , H01L21/302 , H01L21/3065 , H01L21/768 , H01L21/90
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