Patent search ap:("IBM") AND inv:"BAANAADO KAATO BISHIYOFU" Page 1

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发明专利
METHOD OF REGULATING DENSITY AND DISTRIBUTION OF OXYGEN PRECIPITATE PARTICLE 失效

公开(公告)号：JPS58171826A

公开(公告)日：1983-10-08

申请号：JP20051582

申请日：1982-11-17

Applicant: IBM

Inventor： BAANAADO KAATO BISHIYOFU , UIRIAMU JIYON PATORITSUKU , TOOMASU HAIDO SUTORADOUITSUKU

IPC: C30B33/00 , H01L21/322

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