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公开(公告)号：DE3669594D1
公开(公告)日：1990-04-19
申请号：DE3669594
申请日：1986-07-29
Applicant: IBM
IPC: H01L21/66 , G01R31/26 , G01R31/265 , G01R31/302 , G01R31/308 , G01R31/28
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