公开(公告)号：DE3676503D1

公开(公告)日：1991-02-07

申请号：DE3676503

申请日：1986-07-08

Applicant: IBM

Inventor： BINNIG GERD KARL DR ,  GERBER CHRISTOPH EMANUEL

IPC: G12B5/00 ,  B23Q1/36 ,  B25J7/00 ,  G01B21/00 ,  G01Q10/02 ,  G02B21/26 ,  H01J37/20 ,  H01J37/28 ,  B23Q1/14

公开(公告)号：DE3584994D1

公开(公告)日：1992-02-06

申请号：DE3584994

申请日：1985-06-14

Applicant: IBM

Inventor： BINNIG GERD KARL DR ,  FEENSTRA RANDALL MEINDERT ,  HODGSON RODNEY TREVOR ,  ROHRER HEINRICH DR ,  WOODALL JERRY MAC PHERSON

IPC: H01L21/3205 ,  C23C16/04 ,  H01J37/317 ,  H01J37/32 ,  H01L21/00

Abstract: The formation of lines (2) of the order of 0,8 nanometers wide is achieved using a tunneling current through a gas (6) that changes to provide a residue that is the basis of the line (2). The tunneling current energy is tuned to the energy required to dissociate the gas (6). The radius of the tunnel tip (3) and the tip (3)-to-substrate (1) distance (S) are of the order of less than ten nanometers.

公开(公告)号：DE3675158D1

公开(公告)日：1990-11-29

申请号：DE3675158

申请日：1986-07-25

Applicant: IBM

Inventor： BINNIG GERD KARL DR

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q20/00 ,  G01Q60/24 ,  G01N27/00 ,  G01L1/00 ,  H01J37/28