公开(公告)号：DE3777402D1

公开(公告)日：1992-04-16

申请号：DE3777402

申请日：1987-05-12

Applicant: IBM

Inventor： DUERIG URS THEODOR DR ,  GIMZEWSKI JAMES KAZIMIERZ DR ,  ROHRER HEINRICH DR

IPC: G01B7/34 ,  G01B11/30 ,  G01B21/30 ,  G01D5/26 ,  G01L1/08 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/10 ,  G11B17/32 ,  G01L1/14

公开(公告)号：DE3274009D1

公开(公告)日：1986-12-04

申请号：DE3274009

申请日：1982-08-13

Applicant: IBM

Inventor： BINNIG GERD DR ,  GERBER CHRISTOPH ,  ROHRER HEINRICH DR ,  WEIBEL EDMUND

IPC: F16F15/02 ,  F16F7/10 ,  F16F15/04 ,  G01Q30/18 ,  F16F15/06

Abstract: The vibration filter comprises an inner ring (27) on which vibration-sensitive equipment may be installed, the ring (27) being suspended from a plurality of springs (24, 25, 26) elastically supported by posts (18, 19, 20) in turn mounted on an outer ring (1) which is spring-suspended the same as the inner ring (27) from a rigid bench (8). The springs (12, 13, 14; 24, 25, 26) and other elastic members (9, 10, 11; 15, 16, 17; 21, 22, 23; 28, 29, 30) have differing resonant frequencies. Between the bench (8) and the outer ring (1), and between the outer and inner rings (1, 27) there may be provided eddy current brakes consisting of strong permanent magnets (46, 48) arranged opposite individual copper or aluminum blocks (5, 47).

公开(公告)号：DE3584994D1

公开(公告)日：1992-02-06

申请号：DE3584994

申请日：1985-06-14

Applicant: IBM

Inventor： BINNIG GERD KARL DR ,  FEENSTRA RANDALL MEINDERT ,  HODGSON RODNEY TREVOR ,  ROHRER HEINRICH DR ,  WOODALL JERRY MAC PHERSON

IPC: H01L21/3205 ,  C23C16/04 ,  H01J37/317 ,  H01J37/32 ,  H01L21/00

Abstract: The formation of lines (2) of the order of 0,8 nanometers wide is achieved using a tunneling current through a gas (6) that changes to provide a residue that is the basis of the line (2). The tunneling current energy is tuned to the energy required to dissociate the gas (6). The radius of the tunnel tip (3) and the tip (3)-to-substrate (1) distance (S) are of the order of less than ten nanometers.

公开(公告)号：DE3168777D1

公开(公告)日：1985-03-21

申请号：DE3168777

申请日：1981-08-10

Applicant: IBM

Inventor： BINNIG GERD DR ,  NIEVERGELT HERMANN ,  ROHRER HEINRICH DR ,  WEIBEL EDMUND

IPC: H01J37/20 ,  G01Q10/04 ,  G12B1/00 ,  H01L21/68 ,  H01L41/09 ,  H02N2/12 ,  H01L41/08

Abstract: The travelling support (1) comprises a piezo-electric plate (2) resting on three legs (6) whose bottom surface is insulated from the bench (8) on which the support is to travel, by a dielectric (7). The piezo-electric plate (2) can be caused to contract by means of an actuating voltage applied via sliders (9, 10) to top and bottom electrodes on the plate (2). By applying a voltage to the legs (6), these may be clamped selectively by electrostatic forces effective across the dielectric (7). Appropriate control of the actuating and clamping voltages causes the support (1) to either move in a linear or rotary fashion. The displacements the support can perform per step are in the nanometer range.

公开(公告)号：DE3750408T2

公开(公告)日：1995-03-30

申请号：DE3750408

申请日：1987-05-12

Applicant: IBM

Inventor： DUERIG URS THEODOR DR ,  ROHRER HEINRICH DR ,  BINNIG GERD KARL PROF DR

IPC: G01B7/34 ,  G01B11/30 ,  G01B21/30 ,  G01D5/26 ,  G01L1/08 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/10 ,  G11B17/32 ,  G11B11/08

公开(公告)号：DE3750408D1

公开(公告)日：1994-09-22

申请号：DE3750408

申请日：1987-05-12

Applicant: IBM

Inventor： DUERIG URS THEODOR DR ,  ROHRER HEINRICH DR ,  BINNIG GERD KARL PROF DR

IPC: G01B7/34 ,  G01B11/30 ,  G01B21/30 ,  G01D5/26 ,  G01L1/08 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/38 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/10 ,  G11B17/32 ,  G11B11/08