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公开(公告)号:DE3561251D1
公开(公告)日:1988-02-04
申请号:DE3561251
申请日:1985-04-30
Applicant: IBM
Inventor: BINNIG GERD KARL , GERBER CHRISTOPH EMANUEL , ROHRER HEINRICH , WEIBEL EDMUND
IPC: C23C14/22 , B82B3/00 , C23C14/04 , C23C14/24 , C23C26/00 , G11B9/00 , G11B9/14 , H01J37/317 , H01L21/203 , H01L21/285 , C23C14/14 , C23C14/34 , G11B5/84
Abstract: This method involves the deposition of free metal atoms (4) from the apex (5) of a pointed tip (1) supported at a distance of 10 to 20 nm from a substrate (2). The atoms (4) are being field-desorbed under the influence of a strong electric field existing between the tip (1) and the substrate (2). With the tip (1) being moved across the substrate (2), a narrow trace (6) of metal atoms will be deposited on the substrate.
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