公开(公告)号：DE3676503D1

公开(公告)日：1991-02-07

申请号：DE3676503

申请日：1986-07-08

Applicant: IBM

Inventor： BINNIG GERD KARL DR ,  GERBER CHRISTOPH EMANUEL

IPC: G12B5/00 ,  B23Q1/36 ,  B25J7/00 ,  G01B21/00 ,  G01Q10/02 ,  G02B21/26 ,  H01J37/20 ,  H01J37/28 ,  B23Q1/14

公开(公告)号：DE3561251D1

公开(公告)日：1988-02-04

申请号：DE3561251

申请日：1985-04-30

Applicant: IBM

Inventor： BINNIG GERD KARL ,  GERBER CHRISTOPH EMANUEL ,  ROHRER HEINRICH ,  WEIBEL EDMUND

IPC: C23C14/22 ,  B82B3/00 ,  C23C14/04 ,  C23C14/24 ,  C23C26/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/317 ,  H01L21/203 ,  H01L21/285 ,  C23C14/14 ,  C23C14/34 ,  G11B5/84

Abstract: This method involves the deposition of free metal atoms (4) from the apex (5) of a pointed tip (1) supported at a distance of 10 to 20 nm from a substrate (2). The atoms (4) are being field-desorbed under the influence of a strong electric field existing between the tip (1) and the substrate (2). With the tip (1) being moved across the substrate (2), a narrow trace (6) of metal atoms will be deposited on the substrate.