-
公开(公告)号：JPS63115071A
公开(公告)日：1988-05-19
申请号：JP23275587
申请日：1987-09-18
Applicant: IBM
Inventor： BEHA JOHANNES G , BLACHA ARMIN U , CLAUBERG ROLF , SEITZ HUGO K
IPC: H01L21/66 , G01N23/22 , G01R31/02 , G01R31/308 , H05K3/00
Search Results
1
records
(took 0.015 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
