公开(公告)号：JPS63115072A

公开(公告)日：1988-05-19

申请号：JP23275687

申请日：1987-09-18

Applicant: IBM

Inventor： BEHA JOHANNES GEORG ,  BLACHA ARMIN ,  CLAUBERG ROLF ,  SEITZ HUGO K

IPC: H01L21/66 ,  G01N23/225 ,  G01R31/02 ,  G01R31/308 ,  H05K3/00

公开(公告)号：JPS63115071A

公开(公告)日：1988-05-19

申请号：JP23275587

申请日：1987-09-18

Applicant: IBM

Inventor： BEHA JOHANNES G ,  BLACHA ARMIN U ,  CLAUBERG ROLF ,  SEITZ HUGO K

IPC: H01L21/66 ,  G01N23/22 ,  G01R31/02 ,  G01R31/308 ,  H05K3/00

公开(公告)号：DE3683053D1

公开(公告)日：1992-01-30

申请号：DE3683053

申请日：1986-10-23

Applicant: IBM

Inventor： BEHA JOHANNES GEORG ,  BLACHA ARMIN ,  CLAUBERG ROLF ,  SEITZ HUGO K

IPC: H01L21/66 ,  G01N23/225 ,  G01R31/02 ,  G01R31/308 ,  H05K3/00

Abstract: The surface of the IC substrate and the pads on the surface which are connected to the conducting paths to be tested are covered with three layers. The first (13) is of passivating oxide, a second layer of electroluminescent material (15) and a third layer (17) of a conductive material which is so thin as to be transparent to the passage of photons. The focused laser beam is directed to a pad or pads to generate charges by photon-assisted tunnelling of electrons from each selected pad. Consequently, a specific voltage level is induced in each selectedpad and in each non-selected pad which is connected electrically with a selected pad. The whole substrate surface is flooded with a laser beam to excite voltage-dependent photon-assisted electron-tunnelling from pads, the tunnelling intensity being dependent on the potential of each pad. The excitation pattern is detected in the electroluminescent layer, viewed by a TV camera (21).

公开(公告)号：DE3685331D1

公开(公告)日：1992-06-17

申请号：DE3685331

申请日：1986-10-23

Applicant: IBM

Inventor： BEHA JOHANNES GEORG ,  BLACHA ARMIN ,  CLAUBERG ROLF ,  SEITZ HUGO K

IPC: H01L21/66 ,  G01N23/22 ,  G01R31/02 ,  G01R31/308 ,  H05K3/00

Abstract: The energy of the focused laser beam is sufficient to cause photo electric emission from each selected pad (P21) on which the beam is directed, but is insufficient to produce photoelectric emission from the non-conducting substrate. Consequently, a specific voltage level is induced in each selected pad and in each non-selected pad which is connected electrically to a selected pad. The action of the flooding laser beam causes voltage-dependent photoelectric emission from the pads, that is the electrons from the previously-charged pads are of lower kinetic energy than those from uncharged pads. A position-sensitive channel plate (15) is disposed in the vicinity of the flooded face for detecting the pattern of voltage-dependent photoelectric emission from the flooded face of the substrate.

公开(公告)号：CA1085288A

公开(公告)日：1980-09-09

申请号：CA270286

申请日：1977-01-24

Applicant: IBM

Inventor： PENNEBAKER WILLIAM B JR ,  PENNINGTON KEITH S ,  SEITZ HUGO K ,  HOCHBERG FREDERICK

IPC: B01D43/00 ,  B01D45/08 ,  B41J2/175 ,  B41J2/195

Abstract: DYNAMIC REMOVAL OF SOLID IMPURITIES FROM RECIRCULATING INK In an ink jet printer solid impurities contaminating recirculating ink are removed by subjecting contaminated ink to ultrasonic energy for forming an aerosol of the ink. The aerosol of ink is entrained in an air stream and carried to impactor means where the ink aerosol is caused to return to a liquid state.

公开(公告)号：FR2339426A1

公开(公告)日：1977-08-26

申请号：FR7639688

申请日：1976-12-22

Applicant: IBM

Inventor： PENNEBAKER WILLIAM B JR ,  PENNINGTON KEITH S ,  SEITZ HUGO K

IPC: B01D43/00 ,  B01D45/08 ,  B41J2/175 ,  B41J2/195 ,  B01D35/00 ,  B01D37/00 ,  B41J3/04 ,  B41J27/16

Abstract: DYNAMIC REMOVAL OF SOLID IMPURITIES FROM RECIRCULATING INK In an ink jet printer solid impurities contaminating recirculating ink are removed by subjecting contaminated ink to ultrasonic energy for forming an aerosol of the ink. The aerosol of ink is entrained in an air stream and carried to impactor means where the ink aerosol is caused to return to a liquid state.