Patent search ap:("IBM") AND inv:"BROWN WILLIAM WALTER" Page 1

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发明专利
VACUUM CHAMBER 未知

公开(公告)号：DE3378709D1

公开(公告)日：1989-01-19

申请号：DE3378709

申请日：1983-08-23

Applicant: IBM

Inventor： BROWN WILLIAM WALTER , DAHLKE GERHARD PAUL , LUPUL FRANCIS THEODORE

IPC: C23F4/00 , C23C14/34 , C23C14/50 , F16J15/43 , H01J37/18 , H01L21/00 , H01L21/02 , H01L21/203 , H01L21/67 , H01L21/677 , H01J37/30

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