公开(公告)号：DE3378709D1

公开(公告)日：1989-01-19

申请号：DE3378709

申请日：1983-08-23

Applicant: IBM

Inventor： BROWN WILLIAM WALTER ,  DAHLKE GERHARD PAUL ,  LUPUL FRANCIS THEODORE

IPC: C23F4/00 ,  C23C14/34 ,  C23C14/50 ,  F16J15/43 ,  H01J37/18 ,  H01L21/00 ,  H01L21/02 ,  H01L21/203 ,  H01L21/67 ,  H01L21/677 ,  H01J37/30

公开(公告)号：DE3273808D1

公开(公告)日：1986-11-20

申请号：DE3273808

申请日：1982-04-07

Applicant: IBM

Inventor： COSGROVE JAMES FRANCIS ,  DAHLKE GERHARD PAUL ,  WURMS CHARLES

IPC: C23C14/14 ,  C23C14/24 ,  C23C14/26

Abstract: The method and apparatus for coating workpieces (16) with a material involves boatless evaporation of the end of a wire or rod (12) made of said material. The end of the wire is heated by a radiant or inductive heater (14) to form a molten convex meniscus (13) thereon which serves as the coating source in the vacuum chamber (23).