公开(公告)号：EP0886758A1

公开(公告)日：1998-12-30

申请号：EP96903192

申请日：1996-03-13

Applicant: IBM

Inventor： BINNIG GERD KARL ,  BRUGGER JUERGEN ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  VETTIGER PETER

IPC: G01B21/30 ,  G01B5/28 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/32 ,  G01Q70/10 ,  G11B9/00 ,  G11B9/14 ,  G12B1/00

CPC classification number: G01Q70/10 ,  Y10S977/873

Abstract: The present invention concerns a cantilever arrangement for scanning a surface (16). This arrangement comprises a first cantilever (11) having a first probe (14) and a second cantilever (13) having a second probe (15). Both cantilevers (11, 13) are mechanically coupled such that the second cantilever (13) follows the movement of the first cantilever (11), i.e. the deflection of the first cantilever (11) defines the deflection of the second cantilever (13).

公开(公告)号：DE69618627T2

公开(公告)日：2002-09-12

申请号：DE69618627

申请日：1996-03-13

Applicant: IBM

Inventor： BINNIG KARL ,  BRUGGER JUERGEN ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  VETTIGER PETER

IPC: G01B21/30 ,  G01B5/28 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/32 ,  G01Q70/10 ,  G11B9/00 ,  G11B9/14 ,  G12B1/00

公开(公告)号：DE69618627D1

公开(公告)日：2002-02-21

申请号：DE69618627

申请日：1996-03-13

Applicant: IBM

Inventor： BINNIG KARL ,  BRUGGER JUERGEN ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  VETTIGER PETER

IPC: G01B21/30 ,  G01B5/28 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/32 ,  G01Q70/10 ,  G11B9/00 ,  G11B9/14 ,  G12B1/00