公开(公告)号：EP0886758A1

公开(公告)日：1998-12-30

申请号：EP96903192

申请日：1996-03-13

Applicant: IBM

Inventor： BINNIG GERD KARL ,  BRUGGER JUERGEN ,  HAEBERLE WALTER ,  ROHRER HEINRICH ,  VETTIGER PETER

IPC: G01B21/30 ,  G01B5/28 ,  G01B7/34 ,  G01N37/00 ,  G01Q60/32 ,  G01Q70/10 ,  G11B9/00 ,  G11B9/14 ,  G12B1/00

CPC classification number: G01Q70/10 ,  Y10S977/873

Abstract: The present invention concerns a cantilever arrangement for scanning a surface (16). This arrangement comprises a first cantilever (11) having a first probe (14) and a second cantilever (13) having a second probe (15). Both cantilevers (11, 13) are mechanically coupled such that the second cantilever (13) follows the movement of the first cantilever (11), i.e. the deflection of the first cantilever (11) defines the deflection of the second cantilever (13).

公开(公告)号：DE3561251D1

公开(公告)日：1988-02-04

申请号：DE3561251

申请日：1985-04-30

Applicant: IBM

Inventor： BINNIG GERD KARL ,  GERBER CHRISTOPH EMANUEL ,  ROHRER HEINRICH ,  WEIBEL EDMUND

IPC: C23C14/22 ,  B82B3/00 ,  C23C14/04 ,  C23C14/24 ,  C23C26/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/317 ,  H01L21/203 ,  H01L21/285 ,  C23C14/14 ,  C23C14/34 ,  G11B5/84

Abstract: This method involves the deposition of free metal atoms (4) from the apex (5) of a pointed tip (1) supported at a distance of 10 to 20 nm from a substrate (2). The atoms (4) are being field-desorbed under the influence of a strong electric field existing between the tip (1) and the substrate (2). With the tip (1) being moved across the substrate (2), a narrow trace (6) of metal atoms will be deposited on the substrate.

公开(公告)号：BR8703091A

公开(公告)日：1988-03-08

申请号：BR8703091

申请日：1987-06-19

Applicant: IBM

Inventor： BINNIG GERD KARL ,  GERBER CHRISTOPH E

IPC: G12B5/00 ,  B23Q1/36 ,  B25J7/00 ,  G01B21/00 ,  G01Q10/02 ,  G02B21/26 ,  H01J37/20 ,  H01J37/28