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公开(公告)号：DE1949871A1
公开(公告)日：1970-04-09
申请号：DE1949871
申请日：1969-10-02
Applicant: IBM
Inventor： BERKENBLIT MELVIN , REISMAN ARNOLD , BURWELL LIGHT THOMAS
IPC: C30B25/02 , H01L21/00 , H01L21/205 , H01L7/36
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