公开(公告)号：US3367476A

公开(公告)日：1968-02-06

申请号：US57261566

申请日：1966-08-15

Applicant: IBM

Inventor： JESSE ARONSTEIN ,  CACCOMA GEORGE A

IPC: B07C5/344 ,  B65G47/14 ,  H01L21/00 ,  H01L21/68

CPC classification number: H01L21/67144 ,  B07C5/344 ,  B65G47/1421 ,  H01L21/68

公开(公告)号：US3427517A

公开(公告)日：1969-02-11

申请号：US3427517D

申请日：1966-05-19

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  CACCOMA GEORGE A

IPC: H01L21/68 ,  H01G13/00 ,  H01H49/00 ,  H02B3/00

CPC classification number: H01L21/68

公开(公告)号：FR2345767A1

公开(公告)日：1977-10-21

申请号：FR7703514

申请日：1977-02-01

Applicant: IBM

Inventor： CACCOMA GEORGE A ,  CASTRUCCI PAUL P ,  DRUSCHEL WILLIAM O

IPC: B23Q41/00 ,  G01R31/26 ,  G01R31/28 ,  G05B19/418 ,  G06F19/00 ,  H01L21/677 ,  H01L21/68 ,  G06F15/46 ,  H01L21/70

Abstract: A computer controlled manufacturing system employing random access semiconductor wafer storage in the fabrication of integrated circuit devices.

公开(公告)号：CA1058329A

公开(公告)日：1979-07-10

申请号：CA272816

申请日：1977-02-28

Applicant: IBM

Inventor： CACCOMA GEORGE A ,  CASTRUCCI PAUL P ,  DRUSCHEL WILLIAM O

IPC: B23Q41/00 ,  G01R31/26 ,  G01R31/28 ,  G05B19/418 ,  G06F19/00 ,  H01L21/677 ,  H01L21/68 ,  H05K3/00

Abstract: AUTOMATED INTEGRATED CIRCUIT MANUFACTURING SYSTEM A computer controlled manufacturing system for fabricating semiconductor wafers into large scale integrated circuit devices and wherein each semiconductor wafer has scored, or recorded thereon, distinct identifying indicia, such as a machine readable serial number. A plurality of concurrently operable semiconductor wafer processing stations are independently computer controlled. Each of the stations performing at least one discrete fabrication step. A digital computer system operable under stored program control means, said computer system being interconnected with and controlling said processing stations, random access storage means, reading means and conveying means, whereby under computer control selected ones of said semiconductor wafers which are randomly stored in said random access storage means may be selected and fabricated into first part number large scale integrated circuit devices, and selected second ones of said semiconductor wafers randomly stored in said random access storage means may be selected and fabricated into second part number large scale integrated circuit devices, where said first and second part number devices are not identical.

公开(公告)号：CA786991A

公开(公告)日：1968-06-04

申请号：CA786991D

Applicant: IBM

Inventor： ARONSTEIN JESSE ,  CACCOMA GEORGE A