HIGH SHEET RESISTANCE STRUCTURE FOR HIGH DENSITY INTEGRATED CIRCUITS

    公开(公告)号:CA1102011A

    公开(公告)日:1981-05-26

    申请号:CA307633

    申请日:1978-07-18

    Applicant: IBM

    Abstract: HIGH SHEET RESISTANCE STRUCTURE FOR HIGH DENSITY INTEGRATED CIRCUITS A high sheet resistance structure for high density integrated circuits and the method for manufacturing such structure is given. The structure includes a silicon region separated from other silicon regions by a dielectric barrier surrounding the region. A resistor of a first conductivity, for example, N type, encompasses substantially the surface of the silicon region. Electrical contacts are made to the resistor. A region highly doped of a second conductivity, for example, P-type, is located below a portion of the resistor region. This region of second conductivity is connected to the surface. Electrical contacts are made to this varied region for biasing purposes. A second region within the same isolated silicon region may be used as a resistor. This region is located below the buried region of second conductivity. Alternatively, the described resistor regions can be connected as transistors. This allows the formation of a standard masterslice which can be personalized at a late stage in the manufacturing to either resistors or transistors in all or a portion of the standard regions.

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