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公开(公告)号：DE3472839D1
公开(公告)日：1988-08-25
申请号：DE3472839
申请日：1984-11-14
Applicant: IBM
Inventor： CHANG YI-HUA E , GRUODIS ALGIRDAS J , MUHLFELD HANS P , RODRIGUEZ CHARLES W , SHULMAN MARK L
IPC: H01L21/66 , G01R31/3183 , G01R31/319 , G01R31/3193 , G11C29/36 , G11C29/56 , G01R31/28
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