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公开(公告)号：AT467905T
公开(公告)日：2010-05-15
申请号：AT02808339
申请日：2002-12-20
Applicant: IBM
Inventor： RANKIN JED , ABADEER WAGDI , BROWN JEFFREY , CHATTY KIRAN , TONTI WILLIAM , GAUTHIER ROBERT , FRIED DAVID
IPC: H01L23/525 , H01L21/82 , H01L21/84 , H01L27/06 , H01L27/118 , H01L27/12
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