公开(公告)号：DE69207250D1

公开(公告)日：1996-02-15

申请号：DE69207250

申请日：1992-03-21

Applicant: IBM

Inventor： CHEN PEI C ,  WEALE RICHARD D

IPC: H01L23/12 ,  C23C14/02 ,  C23C14/16 ,  H01L21/48 ,  H01L23/14 ,  H05K1/05 ,  H05K3/00 ,  H05K3/38 ,  H05K3/44 ,  C23C14/12 ,  C23F1/18

Abstract: Disclosed is a method of fabricating a microelectronic package having least one layer formed of a copper surface core (1), e.g., a copper-Invar-copper core, with a polymeric dielectric film (5). The method includes removing copper oxide from the copper surface (2,3) of the metallic core or layer. After this step an adhesion layer (4,4'), as a chromium layer, a nickel layer, or chromium and nickel or chromium and copper bilayers, is sputter deposited onto the copper surface of metallic core or layer. A polymeric dielectric film (5) is then applied atop the metallic adhesion layer.

公开(公告)号：SG60072A1

公开(公告)日：1999-02-22

申请号：SG1997002061

申请日：1997-06-14

Applicant: IBM

Inventor： CHEN PEI C ,  GORMAN GRACE LIM ,  HWANG CHERNGYE ,  RAMAN VEDANTHAM

IPC: C23C14/34 ,  C23C16/00 ,  G11B5/31 ,  G11B5/255 ,  G11B5/60 ,  G11B5/71 ,  G11B17/32 ,  G11B21/21

Abstract: A silicon coating on an air bearing surface for magnetic thin film heads. A thick silicon layer is provided to replace metallic layers such as TiW as an overcoat for thin film heads. The silicon layer will provide a durable head-disk interface and act as a reflective surface for fly height measurement. The silicon layer can be planarized with the pole tips to avoid any magnetic spacing loss. The thickness of the silicon coating is preferably between 125 and 6500 angstroms thick. The slider body may be fabricated from silicon such that the silicon coating is substantially identical to the silicon slider body, thereby preventing thermal mismatch therebetween. The silicon coating is preferably applied using a magnetron sputtering technique which provides a high rate of deposition of silicon to form a dense, low stress silicon layer.

公开(公告)号：SG49999A1

公开(公告)日：1998-06-15

申请号：SG1997000027

申请日：1997-01-08

Applicant: IBM

Inventor： CHEN PEI C ,  GORMAN GRACE LIM ,  HWANG CHERNGYE ,  RAMAN VENDANTHAM ,  SIMMONS RANDALL GEORGE

IPC: G11B5/10 ,  G11B5/187 ,  G11B5/255 ,  G11B5/31 ,  G11B5/40 ,  G11B5/60 ,  G11B21/21

Abstract: A single layer wear coating is provided for a magnetic head assembly. The single layer is silicon or silicon-based material with a thickness in the range of 30-75 ANGSTROM . The single layer may be formed by a single step of deposition employing a DC magnetron. The single layer wear coating improves the wear performance of the magnetic head assembly and protects one or more sensitive elements of a magnetic head without significant reduction of spacing loss.