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公开(公告)号：DE2862265D1
公开(公告)日：1983-07-07
申请号：DE2862265
申请日：1978-12-23
Applicant: IBM
Inventor： CHEVALLIER JACQUES PAUL , GUARNIERI CHARLES RICHARD , ONTON AARE , WIEDER HAROLD
IPC: G03G5/08 , H01L31/0248 , H01L31/0376 , H01L31/09 , H01L31/20 , H01S5/00 , H01L31/02 , C22C29/00
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