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    2.
    发明专利
    未知

    公开(公告)号：DE69206087D1

    公开(公告)日：1995-12-21

    申请号：DE69206087

    申请日：1992-08-14

    Applicant: IBM

    Inventor： CUOMO JEROME JOHN ,  GUARNIERI CHARLES RICHARD ,  HOENIG BRUCE ALBERT ,  SEKI HAKIME ,  SPEIDELL JAMES LOUIS ,  WHITEHAIR STANELY JOSEPH

    IPC: C23C16/01 ,  G02B1/10 ,  C23C16/00 ,  G02B5/30

    Abstract: Optical elements, and methods for fabricating them, are described wherein each element includes a free standing (self supporting) polycrystalline continuous thin film of diamond (101) combined with a non-hydrogenated amorphous diamond like carbon (DLC) film having a high percentage of sp bonding (104). These elements may be designed to have optically smooth surfaces, have wide optical transmission ranges (for example, be transparent across the infrared portion of the spectrum), and exhibit exceptional durability characteristics. Optical instruments that include such elements are also described, along with the derivative benefits, such as improved operating performance and lower maintenance requirements, realized using the novel optical elements. In particular, a polarization Michaelson interferometer (PMI) is taught which is operative over the entire range from far infrared into the visible portion of the spectrum without requiring the exchange of beam splitters or beam polarizers. These performance benefits are achieved as a result of the transmission characteristics of the novel optical elements associated with the PMI.

    3.
    发明专利
    未知

    公开(公告)号：DE69206087T2

    公开(公告)日：1996-06-20

    申请号：DE69206087

    申请日：1992-08-14

    Applicant: IBM

    Inventor： CUOMO JEROME JOHN ,  GUARNIERI CHARLES RICHARD ,  HOENIG BRUCE ALBERT ,  SEKI HAKIME ,  SPEIDELL JAMES LOUIS ,  WHITEHAIR STANELY JOSEPH

    IPC: C23C16/01 ,  G02B1/10 ,  C23C16/00 ,  G02B5/30

    Abstract: Optical elements, and methods for fabricating them, are described wherein each element includes a free standing (self supporting) polycrystalline continuous thin film of diamond (101) combined with a non-hydrogenated amorphous diamond like carbon (DLC) film having a high percentage of sp bonding (104). These elements may be designed to have optically smooth surfaces, have wide optical transmission ranges (for example, be transparent across the infrared portion of the spectrum), and exhibit exceptional durability characteristics. Optical instruments that include such elements are also described, along with the derivative benefits, such as improved operating performance and lower maintenance requirements, realized using the novel optical elements. In particular, a polarization Michaelson interferometer (PMI) is taught which is operative over the entire range from far infrared into the visible portion of the spectrum without requiring the exchange of beam splitters or beam polarizers. These performance benefits are achieved as a result of the transmission characteristics of the novel optical elements associated with the PMI.

    6.
    发明专利
    未知

    公开(公告)号：DE3673749D1

    公开(公告)日：1990-10-04

    申请号：DE3673749

    申请日：1986-09-19

    Applicant: IBM

    Inventor： CUOMO JEROME JOHN ,  GUARNIERI CHARLES RICHARD

    IPC: B01J19/08 ,  C23F4/00 ,  H01J37/32 ,  H01L21/203 ,  H01L21/302 ,  H01L21/31 ,  H05H1/22

    Abstract: Plasma enhancement is achieved in a plasma glow system (1) by increasing the number of photoelectric electrons (15) in the plasma glow (11) by producing photoelectrons from the surface of a target (3) in the system by the use of a radiation source (8). This is more particularly accomplished by flooding the surface of the target with a UV laser beam during the plasma process where emitted photoelectrons are injected into the plasma to increase the plasma density.The plasma enhancement is used in a sputter etching/deposition system which includes a chamber containing a cathode (2), a target, a substrate platform (5) containing substrate and a pump. An ultraviolet light source such as a UV laser and focussing optics (9) for focussing the UV radiation onto the target through a UV transmissive window (10) are also provided. A plasma region in the chamber is enhanced by photons from the laser striking the target and producing photoelectrons which are injected into the plasma to increase its density.

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