公开(公告)号：JP2002137352A

公开(公告)日：2002-05-14

申请号：JP2001209568

申请日：2001-07-10

Applicant: IBM

Inventor： YOKOGAMI TOSHIYUKI ,  KAMIYA HIROYUKI ,  CHOKAI KOICHI ,  ODAWARA SHUICHI

IPC: G02F1/13 ,  B32B17/06 ,  B32B17/10 ,  B32B37/16 ,  G02F1/1333 ,  G02F1/1341 ,  G09F9/00 ,  B32B31/04

Abstract: PROBLEM TO BE SOLVED: To manufacture a liquid crystal displaying panel into which no air bubble is dragged by laminating glass base sheets under vacuum. SOLUTION: A color filter base sheets 43a is supported by supporting nails 4a and 4b and on the other hand, the central part of the supported span is pressed by means of a press bar 8. From this condition, the support by means of the supporting nail 4b is released and then, the support by means of the supporting nail 4a is released. While positional shift of a TFT array base sheet 43b of the color filter base sheet 43a is prevented from being generated, it is possible to laminate the color filter base sheet 43a and the TFT array base sheet 43b at established gaps. In addition, precise positioning is performed by using a film with a high frictional coefficient.

公开(公告)号：JP2003195246A

公开(公告)日：2003-07-09

申请号：JP2001381008

申请日：2001-12-14

Applicant: IBM

Inventor： ODAWARA SHUICHI ,  YOKOGAMI TOSHIYUKI ,  CHOKAI KOICHI ,  KAMIYA HIROYUKI

IPC: G02F1/13 ,  G02F1/1333 ,  G09F9/00 ,  G09F9/35 ,  H01L21/683 ,  H01L21/687 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a clamping means capable of surely fixing and positioning a sheet-like substrate even in a vacuum, and the operation mechanism. SOLUTION: A fixing device is provided with a carrying plate 10 on which a glass substrate 102 is mounted, a pawl part 22 clamping and pressing the mounted glass substrate 102 from the periphery at the time of mounting the glass substrate 102 on the carrying plate 10 and an airbag 24 in which gas is sealed to be expanded by the decline of an outside air pressure. The pawl part 22 is operated with the expansion of the airbag 24 as driving force and the glass substrate 102 is fixed. COPYRIGHT: (C)2003,JPO