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公开(公告)号：DE3683028D1
公开(公告)日：1992-01-30
申请号：DE3683028
申请日：1986-10-21
Applicant: IBM
IPC: C23F1/00 , C23F4/00 , G03F7/004 , G03F7/20 , H01L21/268 , H01L21/302 , H01L21/311 , H01L21/3213 , H05K3/02 , H01L21/48 , H01L21/90
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