公开(公告)号：FR2324548A1

公开(公告)日：1977-04-15

申请号：FR7614185

申请日：1976-05-06

Applicant: IBM

Inventor： DRUSCHEL WILLIAM O ,  GARDINEER BAYARD G JR ,  MANNING STANLEY A ,  MUSITS BELA

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G51/02 ,  B65G53/04 ,  H05K13/02

Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.

公开(公告)号：CA1036191A

公开(公告)日：1978-08-08

申请号：CA255047

申请日：1976-06-16

Applicant: IBM

Inventor： DRUSCHEL WILLIAM O ,  GARDINEER BAYARD G JR ,  MANNING STANLEY A ,  MUSITS BELA

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G51/02

Abstract: A portable carrier for a semiconductor wafer is detachably connected to an air slide so that the wafer can be propelled from the carrier to the air slide and vice versa by air from the air slide. The carrier has a chamber with an air slide base on which the wafer is supported by air from the air slide when the wafer is to be propelled into or out of the chamber. The carrier has a single wafer port, which is sealed except when the carrier is connected to the air slide, through which the wafer enters or exits when propelled by air from the air slide. When the carrier chamber is sealed, the wafer is retained in position within the chamber by retaining means, which are rendered ineffective when the wafer is to be propelled into or out of the chamber.