公开(公告)号：WO02064495A3

公开(公告)日：2003-06-05

申请号：PCT/IB0200395

申请日：2002-02-08

Applicant: IBM ,  DESPONT MICHEL ,  DRECHSLER UTE ,  GENOLET GREGOIRE ,  VETTIGER PETER

Inventor： DESPONT MICHEL ,  DRECHSLER UTE ,  GENOLET GREGOIRE ,  VETTIGER PETER

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81C1/00476 ,  B81C2201/0109

Abstract: A method for at least partially releasing microstructures from a substrate is provided. The method comprises the steps of: a) providing a substrate (2); b) depositing onto said substrate (2) a first layer (4) and a second layer (6), the first layer (4) and the second layer (6) each comprising an electrically conducting material and each having a different oxido-reduction potential; c) electrically connecting the first layer (4) and the second layer (6); d) forming a microstructure (8) on the first (4) and second (6) layers deposited in step b) to produce an intermediate structure (10); and e) electrochemically etching said second layer (6) by immersing the intermediate structure (10) formed in step d) in an electrolyte (12).

Abstract translation: 提供了一种至少部分地从基板上释放微结构的方法。 该方法包括以下步骤：a）提供衬底（2）; b）在所述基板（2）上沉积第一层（4）和第二层（6），所述第一层（4）和所述第二层（6）各自包括导电材料并且各自具有不同的氧化还原 潜在; c）电连接第一层（4）和第二层（6）; d）在步骤b）中沉积的第一（4）和第二（6）层上形成微结构（8）以产生中间结构（10）; 以及e）通过将步骤d）中形成的中间结构（10）浸入电解质（12）中来电化学蚀刻所述第二层（6）。

公开(公告)号：AT514049T

公开(公告)日：2011-07-15

申请号：AT02781555

申请日：2002-11-21

Applicant: IBM

Inventor： CROSS GRAHAM ,  DESPONT MICHEL ,  DUERIG URS ,  GENOLET GREGOIRE ,  SCHLITTLER RETO ,  VETTIGER PETER

IPC: G01B7/34 ,  B81B3/00 ,  B82B3/00 ,  C01B31/02 ,  G01Q70/12 ,  G01Q70/16 ,  G11B9/00 ,  G11C23/00

Abstract: A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.

公开(公告)号：AU2002348934A1

公开(公告)日：2003-07-30

申请号：AU2002348934

申请日：2002-11-21

Applicant: IBM

Inventor： CROSS GRAHAM ,  DESPONT MICHEL ,  DURIG URS T ,  GENOLET GREGOIRE ,  SCHLITTLER RETO ,  VETTIGER PETER

IPC: B81B3/00 ,  B82B3/00 ,  C01B31/02 ,  G01B7/34 ,  G01Q70/12 ,  G01Q70/16 ,  G11B9/00 ,  G11C23/00 ,  G12B21/00 ,  G12B21/02

Abstract: A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.