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9 records (took 0.018 seconds)

    1.
    发明专利
    未知

    公开(公告)号：BR9401191A

    公开(公告)日：1994-11-08

    申请号：BR9401191

    申请日：1994-03-16

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS

    IPC: G01R31/02 ,  G01Q30/02 ,  G01R31/26 ,  G01R31/28 ,  G01R31/305 ,  H01L21/66 ,  G01R31/08

    Abstract: A method for measuring electrical characteristics of an electrical device having a conductive structure associated therewith involves the sequence of steps as follows: First, employ a low energy electron beam to charge all conductors on the surface of the device. Expose individual conductors to a focussed low energy electron beam serially. Make measurements of an induced current signal when individual conductors are exposed to the focussed electron beam. Analyze induced current measurements derived from the individual conductors. Then determine electrical characteristics of the device based on the analysis. A charge storage method and three capacitive test methods for defect detection and methods for shorts delineation are described.

    2.
    发明专利
    未知

    公开(公告)号：DE69428820D1

    公开(公告)日：2001-12-06

    申请号：DE69428820

    申请日：1994-03-08

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS

    IPC: G01R31/02 ,  G01Q30/02 ,  G01R31/26 ,  G01R31/28 ,  G01R31/305 ,  H01L21/66

    Abstract: A method for measuring electrical characteristics of an electrical device having a conductive structure associated therewith involves the sequence of steps as follows: First, employ a low energy electron beam to charge all conductors on the surface of the device. Expose individual conductors to a focussed low energy electron beam serially. Make measurements of an induced current signal when individual conductors are exposed to the focussed electron beam. Analyze induced current measurements derived from the individual conductors. Then determine electrical characteristics of the device based on the analysis. A charge storage method and three capacitive test methods for defect detection and methods for shorts delineation are described.

    3.
    发明专利
    未知

    公开(公告)号：DE69024390D1

    公开(公告)日：1996-02-08

    申请号：DE69024390

    申请日：1990-02-20

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D ,  RASCH JUERGEN

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    4.
    发明专利
    未知

    公开(公告)号：DE69033851T2

    公开(公告)日：2002-05-29

    申请号：DE69033851

    申请日：1990-02-20

    Applicant: IBM

    Inventor： RASCH JUERGEN ,  GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    6.
    发明专利
    未知

    公开(公告)号：DE69033851D1

    公开(公告)日：2001-12-13

    申请号：DE69033851

    申请日：1990-02-20

    Applicant: IBM

    Inventor： RASCH JUERGEN ,  GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    7.
    发明专利
    未知

    公开(公告)号：DE69024390T2

    公开(公告)日：1996-07-18

    申请号：DE69024390

    申请日：1990-02-20

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D ,  RASCH JUERGEN

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    8.
    发明专利
    未知

    公开(公告)号：DE69428820T2

    公开(公告)日：2002-04-11

    申请号：DE69428820

    申请日：1994-03-08

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS

    IPC: G01R31/02 ,  G01Q30/02 ,  G01R31/26 ,  G01R31/28 ,  G01R31/305 ,  H01L21/66

    Abstract: A method for measuring electrical characteristics of an electrical device having a conductive structure associated therewith involves the sequence of steps as follows: First, employ a low energy electron beam to charge all conductors on the surface of the device. Expose individual conductors to a focussed low energy electron beam serially. Make measurements of an induced current signal when individual conductors are exposed to the focussed electron beam. Analyze induced current measurements derived from the individual conductors. Then determine electrical characteristics of the device based on the analysis. A charge storage method and three capacitive test methods for defect detection and methods for shorts delineation are described.

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