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8 records (took 0.016 seconds)

    1.
    发明专利
    未知

    公开(公告)号：DE69024390D1

    公开(公告)日：1996-02-08

    申请号：DE69024390

    申请日：1990-02-20

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D ,  RASCH JUERGEN

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    3.
    发明专利
    未知

    公开(公告)号：DE69033851T2

    公开(公告)日：2002-05-29

    申请号：DE69033851

    申请日：1990-02-20

    Applicant: IBM

    Inventor： RASCH JUERGEN ,  GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    6.
    发明专利
    未知

    公开(公告)号：DE69033851D1

    公开(公告)日：2001-12-13

    申请号：DE69033851

    申请日：1990-02-20

    Applicant: IBM

    Inventor： RASCH JUERGEN ,  GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

    7.
    发明专利
    未知

    公开(公告)号：DE69024390T2

    公开(公告)日：1996-07-18

    申请号：DE69024390

    申请日：1990-02-20

    Applicant: IBM

    Inventor： GOLLADAY STEVEN DOUGLAS ,  HOHN FRITZ JUERGEN ,  HUTSON DAVID JOSEPH ,  MEISBURGER WILLIAM D ,  RASCH JUERGEN

    IPC: G01R31/302 ,  G01Q60/40 ,  G01R19/00 ,  G01R19/165 ,  G01R31/305 ,  G01R31/307 ,  H01L21/66

    Abstract: A method of testing electrical connections and short circuits of conductors on a body of insulating material without physical contact includes the steps of: a) applying an unfocused flood electron beam with a low current to a broad surface of the body, simultaneously applying a different focused probe electron beam having an energy predetermined to provide a charge of opposite polarity from the flood beam to other areas of the body to be probed, b) generating an electron beam to cause secondary electron emission from the conductors; and c) detecting the presence of connections not at a given potential.

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