公开(公告)号：US3584933A

公开(公告)日：1971-06-15

申请号：US3584933D

申请日：1969-04-07

Applicant: IBM

Inventor： HABEGGER MILLARD A ,  LIPP JAMES

IPC: G02F1/31 ,  G02F3/00

CPC classification number: G02F1/31

Abstract: Light deflection apparatus for selectively deflecting a beam of light from a source to any one of a plurality of discrete positions on a target is provided. Operative under electro-optic control, the apparatus is of the external reflecting type. A light beam propagated as a set of extraordinary rays never enters the light deflecting birefringent element but is reflected on incidence at it. Astigmatic aberrations in the possible output beams are avoided, pathlength compensation between the two possible output beams of a deflecting stage is achieved, and a diffraction limited spot of light is provided as the output beam.

公开(公告)号：US3901814A

公开(公告)日：1975-08-26

申请号：US48350974

申请日：1974-06-27

Applicant: IBM

Inventor： DAVIS DONALD E ,  HABEGGER MILLARD A ,  MOORE RICHARD D ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: G05D3/12 ,  H01J37/304 ,  H01L21/027 ,  H01J37/00

CPC classification number: H01J37/304

Abstract: A square-shaped beam of charged particles is passed over a registration mark, which is formed by a depression or a rise in the surface of a semiconductor wafer. When the beam passes over one edge of the mark, a positive peak signal is produced from a pair of diode detectors located with their surfaces orthogonal to the direction of the beam scan and a negative peak signal is produced when the beam passes over the other edge of the mark. The amplitudes of these peak signals are balanced so that they are substantially the same irrespective of the location of each of the diode detectors relative to the mark in comparison with the location of the other of the diode detectors relative to the mark. These peak signals are compared with positive and negative threshold signals in comparators with an output signal being produced from each of the comparators when its threshold signal is crossed. This enables location of each of the marks to be determined. The positive and negative threshold signals are set during the prior scan with the scans being in opposite directions. The peak to peak amplitude across the registration mark in a particular area is sampled during the first scan and used to provide an automatic gain factor for the remainder of the scans across the mark so that a substantially constant peak amplitude signal is transmitted to the comparators.

公开(公告)号：US3612652A

公开(公告)日：1971-10-12

申请号：US3612652D

申请日：1969-11-05

Applicant: IBM

Inventor： HABEGGER MILLARD A

IPC: G02B5/00 ,  G02B27/28 ,  G02F1/00 ,  G02F1/31 ,  G02F1/37 ,  G02F1/24

CPC classification number: G02B27/283 ,  G02F1/00 ,  G02F1/31 ,  G02F1/37

Abstract: An optical device having the property that if a light beam is propagated at it in one direction the light beam is totally reflected and if the light beam is propagated at it in the reverse direction it is totally transmitted. A birefringent device has its optical axis in a predetermined direction with respect to the location of incidence of a light beam on it. The birefringent device is disposed in a suitable medium having an index of refraction which is substantially the same as the higher index of refraction of the birefringent device. When the light beam is propagated at a predetermined angle with respect to the birefringent device the nonreciprocal operation of the device occurs.

公开(公告)号：US3632187A

公开(公告)日：1972-01-04

申请号：US3632187D

申请日：1969-11-05

Applicant: IBM

Inventor： HABEGGER MILLARD A

IPC: G02F1/29 ,  G02B27/28 ,  G02F1/00 ,  G02F1/31 ,  G02F1/37 ,  G02F3/00

CPC classification number: G02F1/00 ,  G02B27/283 ,  G02F1/31 ,  G02F1/37

Abstract: Light deflection and scanning apparatus employing a nonreciprocal optical device as a part of an optical circulator. The device has the property that if light is projected to it in one direction it is totally reflected and if it is projected in a second direction it is totally transmitted. By employing this device, optical energy may be coupled into and out of the circulator. The circulator is adjusted so that the optical energy follows a slightly off axis path with each revolution. Electrooptic means of a segmented type are provided in the path of the light in the circulator. The segments are individually controllable for selecting the location of exiting of the light from the circulator.

Abstract translation: 使用不可逆光学装置作为光循环器的一部分的光偏转和扫描装置。 该装置具有如下特征：如果在一个方向上将光投影到其上，则其被全反射，并且如果其沿第二方向投射，则其被完全透射。 通过使用该装置，光能可以耦合到循环器中和从循环器耦合。 循环器被调节，使得每次旋转时光能跟随稍微偏离的轴路径。 在循环器中的光的路径中设置有分段型的电光装置。 这些段可独立控制，用于选择来自循环器的光的离开位置。

公开(公告)号：US3625590A

公开(公告)日：1971-12-07

申请号：US3625590D

申请日：1969-11-05

Applicant: IBM

Inventor： HABEGGER MILLARD A

IPC: H01S3/083 ,  G02B27/28 ,  G02F1/00 ,  G02F1/31 ,  G02F1/37 ,  H01S3/11 ,  G02F1/24

CPC classification number: G02F1/31 ,  G02B27/283 ,  G02F1/00 ,  G02F1/37

Abstract: Optical circulator or storage ring apparatus employing a nonreciprocal optical device and reflecting means to store optical energy. The device has the property that if a light beam is projected to it in one direction it is totally reflected and if projected to it in a second direction it is totally transmitted. By employing this device, optical energy may be coupled into and out of the circulator without optical loss. By exercising control over the polarization of the energy the circulator converts it so that it may be supplied in either continuous wave or pulse form. If a nonlinear crystal is located in the circulator in the path of the energy the apparatus acts to convert from a fundamental wavelength to a predetermined harmonic of that wavelength.

公开(公告)号：US3533104A

公开(公告)日：1970-10-06

申请号：US3533104D

申请日：1968-05-17

Applicant: IBM

Inventor： HABEGGER MILLARD A ,  HARRIS THOMAS J ,  SINCERBOX GLENN T

IPC: G01S1/02 ,  G01S19/15 ,  G01S19/20 ,  G01S19/40 ,  G01S19/48 ,  G02B27/00 ,  G02B27/01 ,  G01S9/00

CPC classification number: G02B27/0149 ,  G01S1/02 ,  G02B27/01 ,  G02B27/0103 ,  G02B2027/0109 ,  G02B2027/0138 ,  G02B2027/014 ,  G02B2027/0145 ,  G02B2027/0154

公开(公告)号：FR2358747A1

公开(公告)日：1978-02-10

申请号：FR7717619

申请日：1977-06-02

Applicant: IBM

Inventor： DAVIS DONALD E ,  HABEGGER MILLARD A ,  YOURKE HANNON S

IPC: H01J37/304 ,  H01L21/70 ,  H01J29/54

Abstract: A square shaped beam of charged particles is passed over a registration mark in the surface of a semiconductor wafer. A signal produced by a diode detector that is responsive to backscattered electrons will peak when the beam passes over each of the edges of the registration mark. The signal is differentiated; and the resultant signal is filtered and amplified to provide information regarding the position of the beam with respect to the wafer. If more than one diode detector is used, the signals are added just before or just after the differentiation.

公开(公告)号：CA1129988A

公开(公告)日：1982-08-17

申请号：CA354065

申请日：1980-06-16

Applicant: IBM

Inventor： HABEGGER MILLARD A ,  HOOKER ROSS B III

IPC: G06K7/10 ,  G02B27/00 ,  G02B27/18 ,  G03G15/04 ,  G11B7/135 ,  H04N1/029 ,  H04N1/19 ,  H04N1/028

Abstract: A system is disclosed in which a light beam from a light source is scanned over the surface of a document to be copied which is located at a nominal document position within the system. Light from the light beam is retro-scattered by the document, collected by a lens system and focused upon a detector. The intensity of the light impinging upon the detector is indicative of information contained upon the portion of the surface of the document being scanned. The system further includes aperture stops for limiting the solid angle of collection of retro-scattered light from a first position beyond the nominal document position from the lens system to a first predetermined angular value and for limiting the solid angle of collection of retro-scattered light from a second position between the nominal document position and the lens system to a second predetermined angular value.

公开(公告)号：FR2276689A1

公开(公告)日：1976-01-23

申请号：FR7516538

申请日：1975-05-21

Applicant: IBM

Inventor： DAVIS DONALD E ,  HABEGGER MILLARD A ,  MOORE RICHARD D ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: G05D3/12 ,  H01J37/304 ,  H01L21/027 ,  H01L21/00 ,  G01B7/14 ,  G06F15/20

Abstract: 1508903 Wave energy position finding INTERNATIONAL BUSINESS MACHINES CORP 23 May 1975 [27 June 1974] 22919/75 Heading G1A [Also in Division H4] The position of a registration mark on a target (e.g. a semi-conductor wafer) is detected by irradiating the mark with a beam of charged particles. The present invention is stated to be an improvement over the system described in Specification 1480562. As described, each mark 42, Fig. 17, consists of vertical and horizontal bars 44, 43 (raised portions or depressions), the position of the mark being determined from 20 horizontal (X) scans followed by 20 vertical (Y) scans, successive scans being in opposite directions. Peak signals corresponding to the edges of a bar are detected and applied to threshold circuitry which is updated during each scan. Diodes 45, 46 and 45', 46' detect radiation during X, Y scans respectively, the arrangement including extra diodes 47 and an extra lead going to a respective preamplifier 48-66 for noise suppression. X-scanning: The outputs 70, 71 from diodes 45, 46 contain peaks 72 &c. corresponding to the edges of a bar 44. These signals pass to a differential amplifier 69 via balancers 58, 60 which compensate for the fact that the mark being scanned will be nearer one diode than the other. The output 85, Fig. 13, from amplifier 69 contains positive and negative peaks 86, 87 corresponding to the edges of a bar. The signals are shown without any ramp component. Such component is removed in filter 89 to leave the peak signals plus a substantially constant residual baseline voltage, Figs. 14 and 15 (not shown). The output from filter 89 is fed via an AGC circuit 90 to positive and negative peak detectors 99, 100 and an averaging circuit 122. During the first scan, outputs 103, 104 from detectors 99, 100 are used to set the gain levels in AGC 90 for subsequent scans so as to compensate for the surface conditions on the wafer in the region of the mark being scanned. At the end of the first scan the contents of 99, 100, 122 are passed to stores 143, 128, 136 the outputs of which are combined by means of resistors 144, 140, 137 to produce positive and negative threshold signals 134 and 141 which are correlated with the residual baseline voltage. These signals pass via differential amplifiers 135, 142 to act as threshold levels for voltage comparators 118, 119 receiving signals from AGC 90 via a switch 116 (blocked during the first scan). During the second scan, fresh data is fed to detectors 99 &c. and stores 143 &c. and switch 116 is enabled to pass the output of AGC 90 to the comparators, outputs of which are however not used until the third scan. During the third and subsequent scans, comparators 118, 119 produce signals whenever the signals from AGC 90 cross the levels set during the preceding scan by amplifiers 135, 142. The ORed outputs from 118, 119 enable a gate 151, so that clockpulses 153 pass to a feedback channel 152 and a computer 19 which uses the detected-edge signals, averaged over the last 18 scans, to determine the location of mark 42. Since successive scans occur in opposite directions, stores 143, 136 incorporate means for reversing the sign of their outputs, so that detectors 99, 100 continue to detect the same edge of a bar 44 during successive scans. The Y-scan is then performed in the same way. The various blocks of Fig. 2 are described in detail with reference to Figs. 3-9 (not shown).

公开(公告)号：CA951153A

公开(公告)日：1974-07-16

申请号：CA73745

申请日：1970-02-03

Applicant: IBM

Inventor： HABEGGER MILLARD A ,  LIPP JAMES

IPC: G02F1/31

Abstract: 1289285 Light deflection apparatus INTERNATIONAL BUSINESS MACHINES CORP 12 March 1970 [7 April 1969] 12040/70 Heading G2J [Also in Division B6] Light deflection apparatus in which astigmatic aberrations caused by the propagation of extraordinary rays through birefringent elements is avoided comprises a transparent medium (e.g. an oil bath) of refractive index Á enclosing two negative birefringent plates 20, 21 of ordinary refractive index Á (e.g. calcite) and two adjustable isotropic plates 22, 23 of refractive index less than Á (e.g. sodium fluoride) arranged as in Fig.3, and polarizing means (not shown) located on the side of plate 20 remote from plate 22 to direct on to plate 20 light polarized either in the ordinary or in the extraordinary sense at an angle of incidence greater than the critical angle for the extraordinary refractive index. The optic axes 24, 25 of plates 20, 21 are disposed in perpendicular planes and the polarizing means (e.g. a KDP crystal) presents a light beam 26 having a linear polarization in one of two orthogonal states. When beam 26 has a polarization in a plane corresponding to the plane of axis 24, it encounters the lower (extraordinary) refractive index of plate 20 and is thus reflected as beam 27; this encounters the higher (ordinary) refractive index p of plate 21 and passes through without refraction to be reflected at the incident face of plate 23 as beam 28. If the polarization of beam 26 is in a perpendicular plane it encounters first the higher index Á of plate 20 and then the lower index of plate 21. To ensure that both possible output beams have the same pathlength, an optical element 34 of refractive index greater than Á is inserted in the path of beam 31, and each output beam is controlled only by altering the difference between distances h 1 and h 2 (which may be adjusted so that plate 23 can be formed as a coating on plate 21). Any number of such arrangements may be assembled, n such arrangements in any one plane yielding 2 n possible output beams Fig. 4 (not shown). Alternative arrangements are illustrated in Figs. 5 and 7 (not shown). A number of the above arrangements 85-88 (Fig.8) may be assembled together with a laser input 80 and a number of telescoping lenses 90-95 in order to select a character from a matrix 82 and to position it at a desired location on an output medium 84.