公开(公告)号：DE2731142A1

公开(公告)日：1978-01-19

申请号：DE2731142

申请日：1977-07-09

Applicant: IBM

Inventor： DAVIS DONALD EUGENE ,  HABEGGER MILLARD ALVIN ,  YOURKE HANNON STANLEY

IPC: H01J37/304 ,  H01L21/68

Abstract: A square shaped beam of charged particles is passed over a registration mark in the surface of a semiconductor wafer. A signal produced by a diode detector that is responsive to backscattered electrons will peak when the beam passes over each of the edges of the registration mark. The signal is differentiated; and the resultant signal is filtered and amplified to provide information regarding the position of the beam with respect to the wafer. If more than one diode detector is used, the signals are added just before or just after the differentiation.

公开(公告)号：DE3062610D1

公开(公告)日：1983-05-11

申请号：DE3062610

申请日：1980-06-24

Applicant: IBM

Inventor： HABEGGER MILLARD ALVIN ,  HOOKER ROSS BRIAN

IPC: G06K7/10 ,  G02B27/00 ,  G02B27/18 ,  G03G15/04 ,  G11B7/135 ,  H04N1/029 ,  H04N1/19 ,  H04N1/028

公开(公告)号：DE2828507A1

公开(公告)日：1979-01-11

申请号：DE2828507

申请日：1978-06-29

Applicant: IBM

Inventor： HABEGGER MILLARD ALVIN

IPC: G01B11/06 ,  G01N17/00 ,  C23F1/00 ,  B44C1/22 ,  H01L21/306

Abstract: An interferometer system and process for detecting etch rates in opaque materials, such as silicon or metal, has means for producing a pair of parallel light beams, one of which is directed to the surface of the opaque material and the other of which is directed to the surface of an adjacent transparent masking material. The rate of etch of the opaque material is determined by detecting and recording the changes of light intensity due to interference between the beam reflected from the opaque layer and the beam reflected from the opaque layer beneath the transparent masking material.

公开(公告)号：DE3580666D1

公开(公告)日：1991-01-03

申请号：DE3580666

申请日：1985-12-10

Applicant: IBM

Inventor： BATES KEITH ALLEN ,  BUDD RUSSELL ALAN ,  HABEGGER MILLARD ALVIN ,  RHOADES MARK LEN

IPC: G02B7/28 ,  G11B7/09 ,  G11B7/125 ,  G02B7/09

公开(公告)号：GB1285640A

公开(公告)日：1972-08-16

申请号：GB5110270

申请日：1970-10-28

Applicant: IBM

Inventor： HABEGGER MILLARD ALVIN

IPC: G02B5/00 ,  G02B27/28 ,  G02F1/00 ,  G02F1/31 ,  G02F1/37

Abstract: 1285640 Optical devices INTERNATIONAL BUSINESS MACHINES CORP 28 Oct 1970 [5 Nov 1969] 51102/70 Heading G2J An optical device comprises a birefringent element 30 disposed in a medium 31 having a refractive index substantially the same as the higher refractive index of the birefringent element, the element having a planar surface 52 which subtends an angle to the optical axis of the element 30 greater than the critical angle, such that light beam 40 propagated in a first direction along the optical axis is transmitted, and light beam 50 impinging on the planar surface in a second direction substantially coplanar with the optical axis and the normal to the planar surface and subtending an angle to the surface greater than the critical angle is either transmitted or reflected or split depending on its plane of polarization.