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公开(公告)号：SE7508426L
公开(公告)日：1976-01-27
申请号：SE7508426
申请日：1975-07-24
Applicant: IBM
Inventor： HALL A V , PERKINS M H , PFEIFFER H C , WEBER E V , WOODARD O C
IPC: H01J37/305 , H01J37/147 , H01J37/304 , H01L21/027 , H01J37/04
Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.
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