公开(公告)号：SE425838B

公开(公告)日：1982-11-15

申请号：SE7808326

申请日：1978-08-02

Applicant: IBM

Inventor： PFEIFFER H C

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/30 ,  B23K15/00

公开(公告)号：SE7808326L

公开(公告)日：1979-02-11

申请号：SE7808326

申请日：1978-08-02

Applicant: IBM

Inventor： PFEIFFER H C

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/30 ,  B23K15/00

公开(公告)号：SE7801728A

公开(公告)日：1978-08-24

申请号：SE7801728

申请日：1978-02-15

Applicant: IBM

Inventor： PFEIFFER H C ,  RYAN P M ,  WEBER E V

IPC: H01J37/147 ,  H01J37/09 ,  H01J37/30 ,  H01L21/027 ,  G21K1/00

CPC classification number: H01J37/3007 ,  H01J37/09

公开(公告)号：SE437441B

公开(公告)日：1985-02-25

申请号：SE7801728

申请日：1978-02-15

Applicant: IBM

Inventor： PFEIFFER H C ,  RYAN P M ,  WEBER E V

IPC: H01J37/147 ,  H01J37/09 ,  H01J37/30 ,  H01L21/027 ,  G21K1/08

公开(公告)号：SE401883B

公开(公告)日：1978-05-29

申请号：SE7508426

申请日：1975-07-24

Applicant: IBM

Inventor： HALL A ,  PERKINS M H ,  PFEIFFER H C ,  WEBER E V ,  WOODARD O C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/04

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.

公开(公告)号：SE7808326A

公开(公告)日：1979-02-11

申请号：SE7808326

申请日：1978-08-02

Applicant: IBM

Inventor： PFEIFFER H C

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/30 ,  B23K15/00

公开(公告)号：SE7801728L

公开(公告)日：1978-08-24

申请号：SE7801728

申请日：1978-02-15

Applicant: IBM

Inventor： PFEIFFER H C ,  RYAN P M ,  WEBER E V

IPC: H01J37/147 ,  H01J37/09 ,  H01J37/30 ,  H01L21/027 ,  G21K1/00

公开(公告)号：SE7508426L

公开(公告)日：1976-01-27

申请号：SE7508426

申请日：1975-07-24

Applicant: IBM

Inventor： HALL A V ,  PERKINS M H ,  PFEIFFER H C ,  WEBER E V ,  WOODARD O C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/04

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.